“…For example, the determination of non-metals, such as Br, C, Cl, F, and S, in gaseous samples has been performed by ICP-OES. [19][20][21] Real-time monitoring and determination of trace metals for continuous on-line process control have also been applied to the polymer industry for analysis of inorganic impurities in ethene gas by ICP-MS. 22 Electronic grade gases utilized for the semiconductor manufacturing process have been introduced to sealed ICP-OES 23,24 and ICP-MS 25 instruments for ultra-trace level impurity measurements.…”