2012
DOI: 10.1021/cm301732t
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Atomic Layer Deposition of Al2O3 onto Sn-Doped In2O3: Absence of Self-Limited Adsorption during Initial Growth by Oxygen Diffusion from the Substrate and Band Offset Modification by Fermi Level Pinning in Al2O3

Abstract: The growth of Al 2 O 3 onto Sn-doped In 2 O 3 (ITO) by atomic layer deposition (ALD) was studied in situ using X-ray photoelectron spectroscopy. Significant diffusion of oxygen from the substrate destroys the self-terminated monolayer adsorption of the metal precursor and results in a nominal initial growth per cycle of >1 nm. The observed mechanism precludes the preparation of monolayer thick Al 2 O 3 films on ITO substrates by ALD. The energy band alignment at the ITO/Al 2 O 3 interface is significantly diff… Show more

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Cited by 37 publications
(71 citation statements)
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“…Transitivity of energy band alignment has been demonstrated explicitly using two different conducting oxides as contact materials, which gives confidence that the experimentally determined alignment is not corrupted by defect-induced Fermi level pinning. 22,39 The obtained band alignments support previous studies by Deaḱ et al 15 and Scanlon et al 16 Moreover, the analysis of the electronic structure shows that the higher valence band maximum of rutile is caused by the stronger overlap between the O 2p z orbitals in rutile compared to those in anatase, leading to a substantial splitting of the resulting energy bands. The staggered band alignment explains the enhanced photocatalytic activity of mixed phase TiO 2 particles 4−9 as it provides a driving force for separation of photoexcited charge carriers.…”
supporting
confidence: 87%
“…Transitivity of energy band alignment has been demonstrated explicitly using two different conducting oxides as contact materials, which gives confidence that the experimentally determined alignment is not corrupted by defect-induced Fermi level pinning. 22,39 The obtained band alignments support previous studies by Deaḱ et al 15 and Scanlon et al 16 Moreover, the analysis of the electronic structure shows that the higher valence band maximum of rutile is caused by the stronger overlap between the O 2p z orbitals in rutile compared to those in anatase, leading to a substantial splitting of the resulting energy bands. The staggered band alignment explains the enhanced photocatalytic activity of mixed phase TiO 2 particles 4−9 as it provides a driving force for separation of photoexcited charge carriers.…”
supporting
confidence: 87%
“…. Several examples for such a behavior with a variation in band alignment of up to 1 eV have been discussed in literature including ZnO/CdS, ITO/Al 2 O 3 , ITO/Cu 2 O, ZnO/In 2 S 3 , and In 2 O 3 /CdS interfaces.…”
Section: Energy Band Alignmentmentioning
confidence: 99%
“…Chemical bath deposited CdS films, e.g., can also exhibit lower Fermi level positions. Whereas the nature of the defects responsible for the pinning in evaporated CdS films is not yet clear, pinning observed in atomic layer deposited Al 2 O 3 films has been suggested to be caused by the incorporation of hydrogen during the growth process …”
Section: Energy Band Alignmentmentioning
confidence: 99%
“…Significant variation of band alignment by up to ∼1 eV depending on sample preparation has been reported for interfaces between CdS or In 2 S 3 and different oxide materials , as well as for interfaces of ITO with Cu 2 O and with Al 2 O 3 . In all these cases, the modification of the band alignment can be attributed to the limitation of band bending in the corresponding materials .…”
Section: Resultsmentioning
confidence: 98%
“…In all these cases, the modification of the band alignment can be attributed to the limitation of band bending in the corresponding materials . Such a limitation can be caused by charged crystallographic defects if the evolution of a band bending causes a change of the charge state of the defects . Such contributions may also explain the different valence band offsets observed at the CuInS 2 /CdS interface.…”
Section: Resultsmentioning
confidence: 99%