Atomic layer deposition of lithium phosphates as solid-state electrolytes for all-solid-state microbatteries

Wang, Biqiong; Liu, Jian; Sun, Qian; Li, Ruying; Sham, Tsun‐Kong; Sun, Xueliang

doi:10.1088/0957-4484/25/50/504007

Cited by 100 publications

(117 citation statements)

References 48 publications

(89 reference statements)

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“…Li 3 PO 4 can be deposited using either LiO t Bu or LiHMDS as the lithium source and TMPO (trimethyl phosphate, Figure 9) as the phosphate precursor [114,115]. The LiO t Bu + TMPO process showed a constant growth rate of approximately 0.7 Å/cycle between 225 and 275 • C [114].…”

Section: Methodsmentioning

confidence: 99%

“…Regardless of the lithium precursor, the phosphate films crystallized into the orthorhombic Li3PO4 phase during HTXRD measurements. Wang et al [115] and Létiche et al [116] have studied the Li3PO4 process using LiO t Bu and TMPO in an effort to measure the lithium-ion conductivity of these films. Wang et al reported an increasing growth rate as a function of the deposition temperature at 250-325 °C, which might be a result of the somewhat unsaturative behaviour of the process [114].…”

Section: Methodsmentioning

confidence: 99%

“…Wang et al reported an increasing growth rate as a function of the deposition temperature at 250-325 °C, which might be a result of the somewhat unsaturative behaviour of the process [114]. Electrochemical impedance spectroscopy showed that the films had rather good conductivities when deposited at 300 °C: 3.3 × 10 −8 S/cm was extrapolated for a film with a composition of Li2.8POz (as determined by XPS) [115]. Similarly, Létiche et al reported conductivities as high as 4.3 × 10 −7 S/cm for Li3PO4 deposited at 300 °C [116].…”

Section: Methodsmentioning

confidence: 99%

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Metal Fluorides as Lithium-Ion Battery Materials: An Atomic Layer Deposition Perspective

2018

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Lithium-ion batteries are the enabling technology for a variety of modern day devices, including cell phones, laptops and electric vehicles. To answer the energy and voltage demands of future applications, further materials engineering of the battery components is necessary. To that end, metal fluorides could provide interesting new conversion cathode and solid electrolyte materials for future batteries. To be applicable in thin film batteries, metal fluorides should be deposited with a method providing a high level of control over uniformity and conformality on various substrate materials and geometries. Atomic layer deposition (ALD), a method widely used in microelectronics, offers unrivalled film uniformity and conformality, in conjunction with strict control of film composition. In this review, the basics of lithium-ion batteries are shortly introduced, followed by a discussion of metal fluorides as potential lithium-ion battery materials. The basics of ALD are then covered, followed by a review of some conventional lithium-ion battery materials that have been deposited by ALD. Finally, metal fluoride ALD processes reported in the literature are comprehensively reviewed. It is clear that more research on the ALD of fluorides is needed, especially transition metal fluorides, to expand the number of potential battery materials available.

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Section: Methodsmentioning

confidence: 99%

Section: Methodsmentioning

confidence: 99%

Section: Methodsmentioning

confidence: 99%

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Metal Fluorides as Lithium-Ion Battery Materials: An Atomic Layer Deposition Perspective

2018

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“…Li 3 PO 4 has been widely used by many commercial all-solid-state battery manufacturers due to the relatively high Li-ion conductivity and (electro)chemical stability with respect to metallic Li anodes [40]. Some methods have been described to deposit thin films of Li 3 PO 4 , including pulsed laser deposition [41,42], atomic layer deposition (ALD) [43], E-beam evaporation [44] and sputter deposition [45,46] . Figure 1(a) shows the deposition thickness of Li 3 PO 4 thin films as a function of time at different temperatures by MOCVD, using tert-butyllithium (t-BuLi) as Li-precursor and trimethyl phosphate(TMPO) as P-precursor [47].…”

Section: Solid-state Electrolytesmentioning

confidence: 99%

Metal-organic chemical vapor deposition enabling all-solid-state Li-ion microbatteries: A short review

2017

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For powering small-sized electronic devices, allsolid-state Li-ion batteries are the most promising candidates due to its safety and allowing miniaturization. Thin film deposition methods can be used for building new all-solid-state architectures. Well-known deposition methods are sputter deposition, pulsed laser deposition, sol-gel deposition, atomic layer deposition, etc. This review summarizes thin film storage materials deposited by metal-organic chemical vapor deposition (MOCVD) for all-solid-state Li-ion batteries. The deposition parameters strongly influence the quality of the films, such as surface morphology, composition, electrochemical stability and cycling performance. Some materials have been successfully deposited by MOCVD into 3D-structured substrates, revealing conformal, homogeneous and high performance battery properties.

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“…Crystalline Li 3 PO 4 on the other hand only provides a conductivity of 10 -18 S/cm. Recently, ALD depositions of both Li 3 PO 4 and LiPON have been reported in literature (6)(7)(8)(9).…”

Section: Introductionmentioning

confidence: 99%

Plasma - Assisted ALD of Lipo(N) for Solid State Batteries

Put¹,

Mees²,

Hornsveld³

et al. 2017

ECS Trans.

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Document VersionPublisher's PDF, also known as Version of Record (includes final page, issue and volume numbers)Please check the document version of this publication:• A submitted manuscript is the author's version of the article upon submission and before peer-review. There can be important differences between the submitted version and the official published version of record. People interested in the research are advised to contact the author for the final version of the publication, or visit the DOI to the publisher's website.• The final author version and the galley proof are versions of the publication after peer review.• The final published version features the final layout of the paper including the volume, issue and page numbers. General rights Copyright and moral rights for the publications made accessible in the public portal are retained by the authors and/or other copyright owners and it is a condition of accessing publications that users recognise and abide by the legal requirements associated with these rights. Link to publication• Users may download and print one copy of any publication from the public portal for the purpose of private study or research.• You may not further distribute the material or use it for any profit-making activity or commercial gain • You may freely distribute the URL identifying the publication in the public portal ? Take down policyIf you believe that this document breaches copyright please contact us providing details, and we will remove access to the work immediately and investigate your claim. All solid state 3D batteries are pursued for their increased safety and high power capabilities. At present conformal coating of the solid electrolyte remains one of the key hurdles for the implementation of such devices. In the present work we investigate atomic layer deposition (ALD) as means of conformal deposition of lithium phosphate (Li 3 PO 4 ) and nitrogen doped lithium phosphates (LiPON). These processes are characterized here to obtain the highest possible Li-ion conductivity. Li 3 PO 4 is shown to yield a conductivity of 10 -10 S/cm. On the other hand, an optimized LiPON process gave rise to a Li-ion conductivity of 5⋅10 -7 S/cm. In addition, good conformality of the LiPON process was shown on high aspect ratio pillars. Furthermore, a solid state battery device was fabricated comprising a Li 4 Ti 5 O 12 cathode, a 70 nm thick ALD LiPON solid electrolyte and a metallic lithium anode. The fabricated device is based on the thinnest solid electrolyte used so far as well as on the first ALD deposited solid electrolyte.

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Atomic layer deposition of lithium phosphates as solid-state electrolytes for all-solid-state microbatteries

Cited by 100 publications

References 48 publications

Metal Fluorides as Lithium-Ion Battery Materials: An Atomic Layer Deposition Perspective

Metal Fluorides as Lithium-Ion Battery Materials: An Atomic Layer Deposition Perspective

Metal-organic chemical vapor deposition enabling all-solid-state Li-ion microbatteries: A short review

Plasma - Assisted ALD of Lipo(N) for Solid State Batteries

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