1998
DOI: 10.1063/1.122304
|View full text |Cite
|
Sign up to set email alerts
|

Atomic structures of hydrogen-terminated Si(001) surfaces after wet cleaning by scanning tunneling microscopy

Abstract: Scanning tunneling microscopy observations are performed on a H-terminated Si(001) surface treated with HF solutions and ultrapure water with very low dissolved oxygen and total organic carbon contents. Over a large area, row structures are observed in [110] and [11̄0] directions. Pyramidal-shaped etch pits are also observed, which are caused by anisotropic etching by OH ions. Detailed images clearly show 2×1 periodic structures. It is suggested that every other row of the ideally dihydride 1×1 surface is etch… Show more

Help me understand this report

Search citation statements

Order By: Relevance

Paper Sections

Select...
1
1
1
1

Citation Types

1
32
0

Year Published

2001
2001
2015
2015

Publication Types

Select...
8
1

Relationship

0
9

Authors

Journals

citations
Cited by 40 publications
(33 citation statements)
references
References 14 publications
1
32
0
Order By: Relevance
“…In terms of surface flatness and cleanliness, this result notably exceeds previous STM results gathered on wet chemically H-passivated Si͑100͒. [16][17][18][19] The scattered contamination of Fig. 2͑b͒ is reminiscent of STM images performed on wet chemically passivated Si͑111͒.…”
mentioning
confidence: 54%
“…In terms of surface flatness and cleanliness, this result notably exceeds previous STM results gathered on wet chemically H-passivated Si͑100͒. [16][17][18][19] The scattered contamination of Fig. 2͑b͒ is reminiscent of STM images performed on wet chemically passivated Si͑111͒.…”
mentioning
confidence: 54%
“…The ͑111͒ oriented Si surface shows the highest atomic packing density, which is less for the ͑100͒ Si surface and is even less dense for the ͑110͒ Si surface. [25][26][27][28] Since the etch and the deposition rates depend on this density, one would expect a faster process in the ͗110͘ direction than in the other directions. This assumption is confirmed by Fig.…”
Section: Discussionmentioning
confidence: 99%
“…The emergence of scanning probe microscopy (SPM) techniques has brought new potential in the study of the interface. Representing a big family of probe-based microscopy, such as scanning tunneling microscopy (STM) and atomic force microscopy (AFM), SPM has demonstrated its ability of morphological detection at high spatial resolution of nanometer level [15,16]. Besides, SPM is easy to be implemented under various environments such as liquid and electrochemical environment, which is a great advantage for SPM compared with electron microscopies.…”
Section: Introductionmentioning
confidence: 99%