Automatic-Patterned Sapphire Substrate Nanometrology Using Atomic Force Microscope

Hung, Shih‐Chang; Cheng, Chung-Wei; Chen, Cheng-Lung

doi:10.1109/tnano.2015.2392128

Cited by 4 publications

(2 citation statements)

References 23 publications

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“…However, STM could only scan samples with conductivity. Given this advantage, AFM has been extensively applied to the field of nanotechnology [4] and biological science [5]. Due to its operating principles, AFM can scan the samples made of conductor or insulator to acquire their high precise topographic images with a xyz-nanopositioning stage [3].…”

Section: Introductionmentioning

confidence: 99%

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Adaptive tilting angles to achieve high‐precision scanning of a dual probes AFM

Liu

et al. 2018

Asian Journal of Control

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Atomic force microscopy (AFM) is a powerful measurement tool, widely used in microfabricated structure inspection. However, since it is typical that the fixed tilting angle of a probe is employed in traditional AFM, the corner and sidewall image of the scanned sample would be distorted. To overcome the problem, a so-called adaptive tilting angle algorithm (ATAA) applied to a self-designed dual-probe AFM system is presented to achieve on-line sidewall estimation during scanning of general samples. Through the use of the proposed ATAA, the tilting angles of dual probes for each scan line can be selfadjusted to the optimal ones. Overall, a probe tilt mechanism is designed, which allows the AFM system to change the tilting angles of the probes during the scanning process such that the dual-probe structure AFM can acquire a complete high precision image with just a single scan. The experimental results show the performance of sidewall measurement and the high-precision image obtained by the proposed method.

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Section: Introductionmentioning

confidence: 99%

“…Due to its operating principles, AFM can scan the samples made of conductor or insulator to acquire their high precise topographic images with a xyz ‐nanopositioning stage . Given this advantage, AFM has been extensively applied to the field of nanotechnology and biological science .…”

Section: Introductionmentioning

confidence: 99%