We present a systematic study of electrochemically active surface states on MOCVD-grown n-type GaN in aqueous electrolytes using cyclic voltammetry and impedance spectroscopy over a wide range of potentials and frequencies. In order to alter the surface states, the GaN samples are either etched or oxidized, and the influence of the surface treatment on the defect-mediated charge transfer to the electrolyte is investigated. Etching in HCl removes substoichiometric GaO x , and leads to a pronounced density of electrochemically active surface states. Oxidation effectively removes these surface states. Published by AIP Publishing. Recently, group-III nitride materials have attracted considerable interest in fields such as photo-electrochemistry and photocatalysis due to the favorable energy position of their band edges with respect to the redox levels of relevant species in liquid electrolytes. [1][2][3][4][5][6] The flexibility in doping III-nitrides in a controlled way enables the deterministic generation of either holes (for n-type doping) or electrons (for p-type doping) at the surface under illumination to selectively drive oxidation or reduction reactions, respectively. The presence of electronic defect states directly at or close to the semiconductor surface is known to influence charge transfer at semiconductor electrodes. Such electronically active surface defects, e.g., are responsible for surface band bending determining the separation of photo-excited charge carriers and laterally inhomogeneous charging of the surface due to local charge trapping. For a quantitative analysis of the influence of surface states on electrochemical processes and Schottky diodes, it is important to understand the mechanisms governing charge transfer across the GaN surface. In a previous work, 7 we have combined the contact potential difference (CPD) and photoconductivity measurements to investigate electronic processes at or close to illuminated GaN surfaces. We could show that localized surface defect states play a crucial role in the kinetics of photo-generated charges. Sachsenhauser et al. have investigated the charge transfer across the n-type SiC/electrolyte interface. 8 They performed cyclic voltammetry and impedance spectroscopy measurements over a wide range of potentials and frequencies. Adding the ferricyanide/ferrocyanide redox couple to the electrolyte made it possible to reveal the contribution of surface states to the charge transfer and determine the energy distribution of the surface states. In this work, we have investigated whether or not electrically active states located in the GaN band gap are also involved in the charge transfer to an electrolyte. To this end, we have systematically studied the n-type GaN grown by metal-organic chemical vapor deposition (MOCVD) in aqueous electrolytes using cyclic voltammetry and impedance spectroscopy. Different surface treatments are applied in order to alter the surface states and investigate the influence of these on the details of defectmediated charge transfer.(000...