High quality n-ZnO films on commercial p-type 6H–SiC substrates have been grown by plasma-assisted molecular-beam epitaxy, and n-ZnO∕p-SiC heterojunction mesa structures have been fabricated. Current-voltage characteristics of the structures had a very good rectifying diode-like behavior with a leakage current less than 2×10−4A∕cm2 at −10V, a breakdown voltage greater than 20V, a forward turn on voltage of ∼5V, and a forward current of ∼2A∕cm2 at 8V. Photosensitivity of the diodes was studied at room temperature and a photoresponsivity of as high as 0.045A∕W at −7.5V reverse bias was observed for photon energies higher than 3.0eV.

We measured the absolute value of the surface band bending in GaN layers grown by molecular beam epitaxy with a charge sensitive surface microprobe. Surface potential measurements showed an upward band bending from 0.7 to 1.4 eV in undoped and Si-doped GaN. The samples stored in dark for one week showed an increase in band bending by up to 0.1 eV. The effect of ultraviolet (UV) exposure (with a lamp or a pulsed nitrogen laser) on band bending was also studied. Typically, the surface barrier decreased by about 0.2 – 0.5 eV under UV light. The barrier was restored very slowly (by a logarithmic law) in the dark at room temperature. These and other similar phenomena are tentatively attributed to thermionic transfer of free electrons from the bulk to the surface states. Photo-induced desorption of oxygen may also play a role in the observed effects.

ZnO is considered as a promising substrate for GaN epitaxy because of stacking match and close lattice match to GaN. Traditionally, however, it suffered from poor surface preparation which hampered epitaxial growth in general and GaN in particular. In this work, ZnO substrates with atomically flat and terrace-like features were attained by annealing at high temperature in air. GaN epitaxial layers on such thermally treated basal plane ZnO with Zn and O polarity have been grown by molecular beam epitaxy, and two-dimensional growth mode was achieved as indicated by reflection high-energy electron diffraction. We observed well-resolved ZnO and GaN peaks in the high-resolution x-ray diffraction scans, with no Ga 2 ZnO 4 phase detectable. Low-temperature photoluminescence results indicate that high-quality GaN can be achieved on both O-and Zn-face ZnO.

We studied restoration of the band bending at the surface of undoped GaN layers after illumination with above-bandgap light. The photovoltage saturated with illumination at about 0.2-0.3 eV at room temperature, although the upward band bending for GaN in the dark is of the order of 1 eV. We attribute the photovoltage effect to charging of the surface states, the density of which is estimated at about 10 12 cm −2. Restoration of the barrier after a light pulse is simulated by a phenomenological model whereby the acceptorlike surface states are emptied of electrons under illumination and filled back in dark due to thermionic transfer of free electrons from the bulk to the surface states over the near-surface barrier. Photoinduced desorption of oxygen also affects the value of the photovoltage if the illumination is prolonged.

The surface band bending, as well as the effect of plasma-induced damage on band bending, on GaN surfaces, was investigated. The upward band bending, measured by surface potential electric force microscopy (a variant of atomic force microscopy), for the as-grown n-type GaN was about 1.0 eV which increased to ∼1.4 eV after reactive ion etching (RIE). UV illumination decreased the band bending by 0.3 eV with time constants on the order of seconds and hundreds of seconds for the as-grown and RIE treated GaN, respectively. This implies that there is a higher density of the surface states in the samples subjected to the RIE process. After the RIE treatment, the shape of the photoluminescence spectrum remained unchanged, but the intensity dropped by a factor of 3. This effect can be attributed to nonradiative defects created near the surface by the RIE treatment.