Beam shaping for ultra-compact waveguide crossings on monolithic silicon photonics platform

Abstract

A beam shaping approach has been implemented to realize high-performance waveguide crossings based on cosine tapers. Devices with a compact footprint of 4.7 µ m × 4.7 µ m were fabricated on the GLOBALFOUNDRIES 45 nm monolithic silicon photonics platform (45 CLO technology). Fabricated devices are found to be nearly wavelength independent ( ± 0.035 d B for 1260 n m ≤ λ ≤ 1360 n m ) with low insertion loss ( ∼ 0.2 d B ) and crosstalk ( − 35 d B ). The measured response of the devices is consistent with the three-dimensional finite-difference time-domain simulation results. The design stability is validated by measuring the device insertion loss on eight chips, which is found to be 0.197 ± 0.017 d B at the designed center wavelength of 1310 nm.

Compact MMI-Based AWGs in a Scalable Monolithic Silicon Photonics Platform

“…In this work, we demonstrate an MMI-based four-channel AWG designed on a monolithic silicon photonics platform with a thin device layer [22]- [24]. The work supports that the studied configuration can be further scaled for future technologies with improved performance figures.…”