III-nitride resonant tunneling diodes ͑RTDs͒, consisting Al 0.2 Ga 0.8 N / GaN double-barrier ͑DB͒ active layers, were grown on c-plane lateral epitaxial overgrowth ͑LEO͒ GaN/sapphire and c-plane freestanding ͑FS͒ GaN. RTDs on both templates, fabricated into mesa diameters ranging from 5 to 35 m, showed negative differential resistance ͑NDR͒ at room temperature. NDR characteristics ͑voltage and current density at NDR onset and current-peak-to-valley ratio͒ were analyzed and reported as a function of device size and substrate choice. Our results show that LEO RTDs perform as well as FS ones and DB active layer design and quality have been the bottlenecks in III-nitride RTDs.