Biaxial initial stress characterization of bilayer gold RF-switches

RF MEMS status and perspectives

“…Following the type of material and the type of properties that has to be determined, an appropriate measurement and characterization technique has to be chosen [34]. Using the data accumulated, we have developed a multi-physic approach targeting the simulation of the inhouse RF MEMS process.…”

TCADMEMS Overview

“…The process that is under discussion here has been already described in [2]. It involves a Si3N4/SiO2 bi-layer that composes the membrane that is bulk micromachining using either wet and/or humid etching techniques.This type of technology allows the fabrication of microwave circuits featuring quasi free space behavior that translates into very low insertion loss at millimeterwave and submillimeterwave range.…”

“…In this paper, two categories of RF MEMS will be investigated. The first category of MEMS deals with the suspended membrane MEMS that mainly involves bulk micromachining process [2] and that does not comprises moveable structures.…”

Miniaturized Wireless Sensor Networks

“…One of the main issue with this concept deals with the compatibility of the different technologies. In order to develop technologies that are compatible between each other it is very important to monitor, to control and to model the mechanical strain associated with the different technological processes [3]. Table 1 summarizes the different parameters that are needed to be known and the corresponding measurement techniques.…”

“…It has to be noticed that for millimeterwave range UWB is attractive as it is easier to have a large useable bandwidth. Figure 6 shows the range of communication calculated through equations (1,2,3,4) that shows that most of the protocols are devoted for short range communication. It has to be noticed that using millimeterwave range will be very interesting for short range communication and high bit rate.…”