Biaxial resonant 7mm-MEMS mirror for automotive LIDAR application

Hofmann, Ulrich; Senger, Frank; Soerensen, Frerk; Stenchly, Vanessa; Jensen, Bjöern; Janes, Joachim

doi:10.1109/omems.2012.6318847

Cited by 28 publications

(13 citation statements)

References 2 publications

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“…Micro-mirror based LiDAR have drawn the attention of many researchers for the realization of 3D distance measurement [ 1 , 2 , 3 , 4 , 5 , 6 , 7 ]. Traditional laser scanners for LiDAR consist of heavy, expensive and large rotational optical devices.…”

Section: Introductionmentioning

confidence: 99%

Large-Aperture kHz Operating Frequency Ti-alloy Based Optical Micro Scanning Mirror for LiDAR Application

Zhang

You

2017

Micromachines

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A micro scanning mirror is an optical device used to scan laser beams which can be used for Light Detection and Ranging (LiDAR) in applications like unmanned driving or Unmanned Aerial Vehicle (UAV). The MEMS scanning mirror’s light-weight and low-power make it a useful device in LiDAR applications. However, the MEMS scanning mirror’s small aperture limits its application because it is too small to deflect faint receiving light. In this paper, we present a Ti-alloy-based electromagnetic micro scanning mirror with very large-aperture (12 mm) and rapid scanning frequency (1.24 kHz). The size of micro-scanner’s mirror plate reached 12 mm, which is much larger than familiar MEMS scanning mirror. The scanner is designed using MEMS design method and fabricated by electro-sparking manufacture method. As the experimental results show, the resonant frequency of the micro scanning mirror is 1240 Hz and the optical scanning angle can reach 26 degrees at resonance frequency when the actuation current is 250 mApp.

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Section: Introductionmentioning

confidence: 99%

Large-Aperture kHz Operating Frequency Ti-alloy Based Optical Micro Scanning Mirror for LiDAR Application

Zhang

You

2017

Micromachines

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“…Several MEMSbased lidar sensors have already been developed in various application such as space applications [33,34], robotics [35,36] and wind velocimetry [37], showing the feasibility of the technology. For automotive applications, Hoffman et al developed a 360 • scanning 2D MEMS scanner lidar with 60 • of azimuth angle [38] [41]. MEMS lidar sensors are also used for testing of the lidar technique itself, e.g.…”

Section: Review On Current Development Of Mems-based Lidarmentioning

confidence: 99%

MEMS-based lidar for autonomous driving

Yoo

Druml

Brunner

et al. 2018

Elektrotech. Inftech.

138

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Lidar, the acronym of light detection and ranging, has received much attention for the automotive industry as a key component for high level automated driving systems due to their high resolution and highly accurate 3D imaging of the surroundings under various weather conditions. However, the price and resolution of lidar sensors still do not meet the target values for the automotive market to be accepted as a basic sensor for ensuring safe autonomous driving. Recent work has focused on MEMS scanning mirrors as a potential solution for affordable long range lidar systems. This paper discusses current developments and research on MEMS-based lidars. The LiDcAR project is introduced for bringing precise and reliable MEMS-based lidars to enable safe and reliable autonomous driving. As a part of development in this project, a test bench for the characterization and performance evaluation of MEMS mirror is introduced. A recently developed MEMS-based lidar will be evaluated by various levels of tests including field tests based on realistic scenarios, aiming for safe and reliable autonomous driving in future automotive industry.

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“…Micromirror is a kind of optical—Microelectromechanical systems (MEMS) device that has a vast array of applications due to its high performance, low production cost, small size, and low power consumption [ 1 , 2 , 3 ]. It has been widely used in laser projection, barcode scanners, confocal microscopy, finger printing sensing, head-up displays, optical coherence tomography (OCT) and Lidar [ 4 , 5 , 6 , 7 , 8 , 9 , 10 ]. For the application of laser projection, the displays are created by using a micromirror to scan a modulated light beam to cover the desired field of view [ 11 , 12 , 13 , 14 , 15 , 16 , 17 ].…”

Section: Introductionmentioning

confidence: 99%

Optimization of MOEMS Projection Module Performance with Enhanced Piezoresistive Sensitivity

Zhou

Wang

et al. 2020

Micromachines

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In scanning laser projection systems, the laser modulation time is important for the projection resolution. The modulation time needs to be matched with the motion of the micromirror. For this paper, the piezoresistive sensor was integrated on the torsion beam of the micromirror to monitor the physical position of the micromirror. The feedback signal was used to generate the zero-crossing time, which was used to estimate the physical position of the resonating mirror over time. The estimated position was affected by the zero-crossing time and the error directly influenced the definition of the projected image. By reducing the impurity concentration from 3 × 1018/cm3 to 1 × 1018/cm3 and increasing shear stress on piezoresistive sensor, the sensitivity of the piezoresistive sensor increased from 4.4 mV/V° to 6.4 mV/V° and the error of the image pixel reduced from 1.5 pixels to 0.5 pixels. We demonstrated that the image quality of an Optical-Microeletromechanical Systems (MOEMS) laser projection could be improved by enhancing the sensitivity of the piezoresistive sensor.

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Biaxial resonant 7mm-MEMS mirror for automotive LIDAR application

Cited by 28 publications

References 2 publications

Large-Aperture kHz Operating Frequency Ti-alloy Based Optical Micro Scanning Mirror for LiDAR Application

Large-Aperture kHz Operating Frequency Ti-alloy Based Optical Micro Scanning Mirror for LiDAR Application

MEMS-based lidar for autonomous driving

Optimization of MOEMS Projection Module Performance with Enhanced Piezoresistive Sensitivity

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