2022
DOI: 10.20517/ss.2022.06
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Biocompatible composite thin-film wearable piezoelectric pressure sensor for monitoring of physiological and muscle motions

Abstract: Whereas piezoelectric pressure sensors (PPSs) have been applied in the monitoring of human body movement and physiological parameters, they show inherent limitations in wearable applications, including toxicity, degradation, and brittleness. In this study, we develop safe, stable, and mechanically flexible composite thin films consisting of polyvinylidene fluoride (PVDF), BaTiO3 nanoparticles (BTO-NPs), and textured aluminum nitride (AlN) thin film for the demonstration of wearable PPS with enhanced output per… Show more

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Cited by 20 publications
(8 citation statements)
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“…More applied force to the sensor means higher deflection and higher generated voltage by the sensor. [ 19 ] The results are normalized by the thickness of the thin films (2 µm), as the output voltage depends on the film thickness: VOCbadbreak=eεxt\[ \begin{array}{*{20}{c}}{{V_{{\rm{OC}}}} = \frac{e}{\varepsilon }xt}\end{array} \] where V OC is the open circuit voltage, x is the applied strain, and t is the thickness of piezoelectric films. Higher voltage is obtained from a thicker piezoelectric film; however, the mechanical flexibility is limited in thicker inorganic films.…”
Section: Resultsmentioning
confidence: 99%
See 1 more Smart Citation
“…More applied force to the sensor means higher deflection and higher generated voltage by the sensor. [ 19 ] The results are normalized by the thickness of the thin films (2 µm), as the output voltage depends on the film thickness: VOCbadbreak=eεxt\[ \begin{array}{*{20}{c}}{{V_{{\rm{OC}}}} = \frac{e}{\varepsilon }xt}\end{array} \] where V OC is the open circuit voltage, x is the applied strain, and t is the thickness of piezoelectric films. Higher voltage is obtained from a thicker piezoelectric film; however, the mechanical flexibility is limited in thicker inorganic films.…”
Section: Resultsmentioning
confidence: 99%
“…More applied force to the sensor means higher deflection and higher generated voltage by the sensor. [19] The results are normalized by the thickness of the thin films (2 µm), as the output voltage depends on the film thickness:…”
Section: Fundamental Piezoelectric Characteristics Of Iii-n Thin Filmsmentioning
confidence: 99%
“…Compared with other existing soft devices based on piezoresistive [ 9 , 10 , 11 ], capacitive [ 12 ], triboelectric [ 13 , 14 , 15 , 16 ] or magnetoelastic effects [ 17 ], piezoelectric devices have received great interest in the field of flexible wearable electronics due to their simple structure, efficient electromechanical coupling and self-powered characteristics [ 19 , 20 ]. Currently, research on flexible piezoelectric materials has flourished, such as zinc oxide (ZnO) [ 21 , 22 ], poly(vinylidene fluoride) (PVDF) [ 23 , 24 ] and its copolymers [ 25 , 26 ]. However, piezoelectric devices based on such materials are difficult to adopt in high-performance applications due to their relatively low piezoelectric output.…”
Section: Introductionmentioning
confidence: 99%
“…With the development of health-monitoring applications, flexible sensors are being required in growing number [ 1 ]. The existing flexible tactile sensors can be divided according to their working mechanism, including piezoresistive [ 2 , 3 ], capacitive [ 4 , 5 , 6 , 7 , 8 ], triboelectric [ 9 , 10 ], and piezoelectric [ 11 , 12 , 13 , 14 , 15 ] sensors. Among these sensors, capacitive sensors with a dielectric layer sandwiched between two electrodes exhibit the advantages of a simple structure, facile manufacturing, low energy consumption, and static/dynamic detection.…”
Section: Introductionmentioning
confidence: 99%