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Syms, R.R.A.; Holmes, Andrew S.; Huang, Weijia; Schneider, Vitor M.; Green, M.

doi:10.1023/a:1008606220011

Cited by 20 publications

(7 citation statements)

References 5 publications

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“…Spin coating process can be divided into number of sub processes i.e. dispense of liquid, spinning and drying of thin films (Sahu et al 2009;and Syms et al 1998). Spin coating process starts from displacing few drops of liquid on rotating disk and rotated at some rpm's for fixed amount of time (Ohara et al 1989;and Haas et al 2001).…”

Section: Introductionmentioning

confidence: 99%

Development of Spin Coating System Based on AC Universal Motor for Deposition of Polymer Films

Gaur¹,

Rana²

2014

JSI

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In this research work we have developed a spin coating system that has capability of holding wafer size of 1.5˝ with the help of vacuum pump. A control unit is provided for achieving the spin rate in range of 500-6000 rpm. An ac universal motor was used for rotating the vacuum chuck. The spin coater whole structure was firstly mechanically designed and then fabricated on rigid platform. Moreover in order to evaluate the performance of developed spin coating unit, polymer film of polyvinylidene difluoride (PVDF) were deposited on silicon substrate and corning glass slide. The thickness of film deposited by spin coating unit is found to be 15-95 μm. The prominent feature of this whole developed system is simplicity, ruggedness and easily adjustable spin rate. The developed spin coating system was successfully utilized for depositing films on various sizes of substrate and glass slides.

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Section: Introductionmentioning

confidence: 99%

Development of Spin Coating System Based on AC Universal Motor for Deposition of Polymer Films

Gaur¹,

Rana²

2014

JSI

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“…The sol-gel method, based on wet chemistry, has two main advantages for the fabrication of PBG structures: it is a cheap and versatile technique to deposit alternating layers of different materials with controlled refractive index and thickness; it is a simple and highly flexible method to dope the dielectric films with various active materials. However, cracking easily takes place during sol-gel processing when the total thickness of the multilayer structure exceeds a value of around 1 µm, which is a serious shortcoming of this technique [15,20]. This difficulty generally prevents the fabrication of PBG devices needing very complex structures or long working wavelengths by sol-gel processing.…”

Section: Introductionmentioning

confidence: 99%

High quality factor Er-doped Fabry–Perot microcavities by sol–gel processing

Li¹,

Fortes²,

Chiappini

et al. 2009

J. Phys. D: Appl. Phys.

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An optimized sol–gel process was developed to fabricate 1D photonic bandgap structures. Several erbium-doped Fabry–Perot microcavities were prepared and characterized. The thickest sample contained two Bragg mirrors, each having 12 distributed Bragg reflector periods of alternating silicate glass and titania layers. The total thickness of this sample reached ∼12 µm. The Er3+ photoluminescence spectra at 1.5 µm were measured for the microcavities. A quality factor of 250 and an Er3+ photoluminescence enhancement of 96 times at 1.5 µm have been reached. The sol–gel processing details, the crystallization of the titania films and the refractive index of the deposited materials are discussed in detail. The simulated optical spectra of the microcavities were found to agree well with the actually measured curves. These results demonstrate that the present sol–gel processing technique is of potential interest for low cost fabrication of 1D photonic bandgap devices.

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“…Such waveguides can be made efficiently and reliably by extending the VLSI platform that was originally developed for microelectronics [2]. 0022 There are a number of deposition techniques that can be advantageously used for fabrication of planar waveguides: flame hydrolysis deposition (FHD) [3], low pressure chemical vapor deposition (LPCVD) [4], sputtering [5], oxidation of porous silicon [6] and sol-gel coating [7][8][9]. Current fabrication of silica-on-silicon PLCs is primarily based on FHD [10] and LPCVD [11] technologies.…”

Section: Introductionmentioning

confidence: 99%