Bonding structure and mechanical properties of B-C-N thin films synthesized by pulsed laser deposition at different laser fluences

Wang, C.B.; Jun, Xiao; Shen, Qiang; Zhang, L.M.

doi:10.1016/j.tsf.2016.02.053

Cited by 23 publications

(10 citation statements)

References 32 publications

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“…There have been efforts to deposit BCN thin films by sputtering, − HiPIMS, PECVD, , LPCVD, APCVD, and pulsed laser deposition (PLD). − These studies have focused on the film composition or the study of bonding to verify whether the films were the products of atomic hybridization of B–C–N. , The optical properties of BCN with varying composition have not been investigated in detail. Furthermore, wide range tunability of the bandgap and resistivity from graphene to BN of BCN has not been reported.…”

Section: Introductionmentioning

confidence: 99%

Compositional Tuning of Electrical and Optical Properties of PLD-Generated Thin Films of 2D Borocarbonitrides (BN)_1–x(C)_x

Attri

Sreedhara

Rao

2019

ACS Appl. Electron. Mater.

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Borocarbonitrides, (BN)1–x (C) x , provide a means of composition-tuning the bandgap of BN and graphene. (BN)1–x (C) x thin films of varied chemical compositions have been deposited on c-sapphire by pulsed laser deposition and characterized by spectroscopic and microscopic techniques. Optical and electrical properties of these films show systematic changes in the band gap and the resistivity with composition. Thus, the optical band gap of the films shows a nearly linear dependence on the composition. The study throws light on the semiconducting nature of the (BN)1–x (C) x thin films with the films exhibiting Efros-Shklovskii (ES) variable range hopping in the low-temperature regime.

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Section: Introductionmentioning

confidence: 99%

Compositional Tuning of Electrical and Optical Properties of PLD-Generated Thin Films of 2D Borocarbonitrides (BN)_1–x(C)_x

Attri

Sreedhara

Rao

2019

ACS Appl. Electron. Mater.

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“…They concluded that the hierarchy of energetic stability of bonds in BCN follows the sequence B–N > C–C > C–N > C–B > B–B > N–N. The same conclusion was reached despite the different depositions method used in these studies, namely plasma CVD [ 20 , 29 ], ion-beam-assisted deposition [ 22 , 30 ], magnetron sputtering [ 31 ], pulse laser deposition [ 32 ], or laser abration [ 33 ].…”

Section: Resultsmentioning

confidence: 80%

“…Figure 16 shows the results of peak fitting of the B 1s, C 1s, N 1s, and O 1s spectra of the a-BCN film. Each peak was deconvoluted separately [ 20 , 22 , 29 , 30 , 31 , 32 , 33 , 60 , 61 , 62 ]. The O 1s and B 1s spectra of a-BCN confirm the presence of B–O bonds.…”

Section: Resultsmentioning

confidence: 99%

Structural and Mechanical Properties of a-BCN Films Prepared by an Arc-Sputtering Hybrid Process

et al. 2021

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Amorphous boron carbon nitride (a-BCN) films exhibit excellent properties such as high hardness and high wear resistance. However, the correlation between the film structure and its mechanical properties is not fully understood. In this study, a-BCN films were prepared by an arc-sputtering hybrid process under various coating conditions, and the correlations between the film’s structure and mechanical properties were clarified. Glow discharge optical emission spectroscopy, X-ray photoelectron spectroscopy, Fourier-transform infrared spectroscopy, and Raman spectroscopy were used to analyze the structural properties and chemical composition. Nanoindentation and ball-on-disc tests were performed to evaluate the hardness and to estimate the friction coefficient and wear volume, respectively. The results indicated that the mechanical properties strongly depend on the carbon content in the film; it decreases significantly when the carbon content is <90%. On the other hand, by controlling the contents of boron and nitrogen to a very small amount (up to 2.5 at.%), it is possible to synthesize a film that has nearly the same hardness and friction coefficient as those of an amorphous carbon (a-C) film and better wear resistance than the a-C film.

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“…In the literature, various studies are illustrated to evaluate the mechanical properties of BCN. Wang et al 65 studied the mechanical properties of BCN films deposited by pulsed laser deposition (PLD) method with respect to variation in the laser fluences because laser fluence is an important criterion for energy processing, which determines the generation of species such as atom, ion, and cluster from the target source, and it affects the reaction between the species. A relationship exists between the bonding structure, and the mechanical characteristic exhibited by these BCN films is evaluated.…”

Section: Properties Of Boron Carbon Nitridementioning

confidence: 99%

Boron carbon nitride (BCN): an emerging two-dimensional nanomaterial for supercapacitors

Thomas,

Cherusseri

2023

J. Mater. Chem. A

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Bonding structure and mechanical properties of B-C-N thin films synthesized by pulsed laser deposition at different laser fluences

Cited by 23 publications

References 32 publications

Compositional Tuning of Electrical and Optical Properties of PLD-Generated Thin Films of 2D Borocarbonitrides (BN)_1–x(C)_x

Compositional Tuning of Electrical and Optical Properties of PLD-Generated Thin Films of 2D Borocarbonitrides (BN)_1–x(C)_x

Structural and Mechanical Properties of a-BCN Films Prepared by an Arc-Sputtering Hybrid Process

Boron carbon nitride (BCN): an emerging two-dimensional nanomaterial for supercapacitors

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Bonding structure and mechanical properties of B-C-N thin films synthesized by pulsed laser deposition at different laser fluences

Cited by 23 publications

References 32 publications

Compositional Tuning of Electrical and Optical Properties of PLD-Generated Thin Films of 2D Borocarbonitrides (BN)1–x(C)x

Compositional Tuning of Electrical and Optical Properties of PLD-Generated Thin Films of 2D Borocarbonitrides (BN)1–x(C)x

Structural and Mechanical Properties of a-BCN Films Prepared by an Arc-Sputtering Hybrid Process

Boron carbon nitride (BCN): an emerging two-dimensional nanomaterial for supercapacitors

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Product

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Compositional Tuning of Electrical and Optical Properties of PLD-Generated Thin Films of 2D Borocarbonitrides (BN)_1–x(C)_x

Compositional Tuning of Electrical and Optical Properties of PLD-Generated Thin Films of 2D Borocarbonitrides (BN)_1–x(C)_x