Bridging Experiments and Simulations in Oblique Angle Polymerization

Çetinkaya, Murat; Demirel, Melik C.

doi:10.1002/cvde.200806747

Cited by 7 publications

(4 citation statements)

References 14 publications

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“…Detailed analysis of the effect of deposition parameters on the structure of OAP fi lms was reported by Cetinkaya and Demirel. [ 145 ] Pursel et al demonstrated OAP in a commercial polymer PVD system with modifi cations including the insertion of a 1/4ᮀ diameter nozzle for precursor injection, and the addition of the substrate rotation and inclination motors. The dimer used was para-chloroxylylene, and the deposited polymer consisted of a benzene ring with two para-methylene groups and one chlorine side group, having the chemical formula C 8 H 7 Cl.…”

Section: Figure 21 Glancing Angle Deposition (Glad) (A)mentioning

confidence: 99%

Engineering of Micro‐ and Nanostructured Surfaces with Anisotropic Geometries and Properties

Tawfick¹,

Volder²,

Copic³

et al. 2012

Advanced Materials

217

179

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Widespread approaches to fabricate surfaces with robust micro- and nanostructured topographies have been stimulated by opportunities to enhance interface performance by combining physical and chemical effects. In particular, arrays of asymmetric surface features, such as arrays of grooves, inclined pillars, and helical protrusions, have been shown to impart unique anisotropy in properties including wetting, adhesion, thermal and/or electrical conductivity, optical activity, and capability to direct cell growth. These properties are of wide interest for applications including energy conversion, microelectronics, chemical and biological sensing, and bioengineering. However, fabrication of asymmetric surface features often pushes the limits of traditional etching and deposition techniques, making it challenging to produce the desired surfaces in a scalable and cost-effective manner. We review and classify approaches to fabricate arrays of asymmetric 2D and 3D surface features, in polymers, metals, and ceramics. Analytical and empirical relationships among geometries, materials, and surface properties are discussed, especially in the context of the applications mentioned above. Further, opportunities for new fabrication methods that combine lithography with principles of self-assembly are identified, aiming to establish design principles for fabrication of arbitrary 3D surface textures over large areas.

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Section: Figure 21 Glancing Angle Deposition (Glad) (A)mentioning

confidence: 99%

Engineering of Micro‐ and Nanostructured Surfaces with Anisotropic Geometries and Properties

Tawfick¹,

Volder²,

Copic³

et al. 2012

Advanced Materials

217

179

View full text Add to dashboard Cite

show abstract

“…41,42 In addition, Demirel's group in Penn State University developed a glancing angle polymerization method to grow polymer nanostructure arrays such as parylene and poly(p-xylylene) nanowires with different shapes. [43][44][45][46][47] This deposition technique is actually a combination of PVD, CVD and GLAD. Their demonstrations show that GLAD has been extended from engineering conventional inorganic nanostructures to the fabrication of organic nanostructures.…”

Section: Introductionmentioning

confidence: 99%

Advanced multi-component nanostructures designed by dynamic shadowing growth

Zhao

2011

Nanoscale

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Dynamic shadowing growth is a simple and powerful nanofabrication technique that combines oblique angle deposition with substrate manipulation in a thin film deposition system, which mainly utilizes self-shadowing effect to form well-aligned nanorod arrays. Many unique nanostructures have been fabricated or designed by properly programming the substrate motions, deposition sources, deposition rates, and shadowing effects in multi-step shadowing growth processes. The formed nanostructures have found many promising applications such as chemical and biological sensors, energy storages, nanomotors, etc., due to their unique characteristics of well-controlled morphologies, structures, and compositions. This review is focused on the design and fabrication of both compositionally and morphologically complex nanostructure arrays by multilayer and co-deposition shadowing growth techniques, and the emphasis will be put on the design and fabrication of multi-component nanostructures with different morphologies.

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“…The direction of the monomer vapor flux at an oblique angle of around 10° to the substrate plane results in the formation of slanted nanocolumns via a self-shadowing mechanism with a diameter of around 150 nm [39–41]. The slanting angle can be controlled via the deposition angle.…”

Section: Reviewmentioning

confidence: 99%

“…A significant amount of work was conducted by Demirel and co-workers on the formation of 3D polymer structures using oblique angle polymerization deposition, analogous to the method already widely applied for the formation of inorganic structures [ 38 ]. The direction of the monomer vapor flux at an oblique angle of around 10° to the substrate plane results in the formation of slanted nanocolumns via a self-shadowing mechanism with a diameter of around 150 nm [ 39 – 41 ]. The slanting angle can be controlled via the deposition angle.…”

Section: Reviewmentioning

confidence: 99%

Nanotopographical control of surfaces using chemical vapor deposition processes

Koenig¹,

Lahann²

2017

Beilstein J. Nanotechnol.

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In recent years much work has been conducted in order to create patterned and structured polymer coatings using vapor deposition techniques – not only via post-deposition treatment, but also directly during the deposition process. Two-dimensional and three-dimensional structures can be achieved via various vapor deposition strategies, for instance, using masks, exploiting surface properties that lead to spatially selective deposition, via the use of additional porogens or by employing oblique angle polymerization deposition. Here, we provide a concise review of these studies.

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Bridging Experiments and Simulations in Oblique Angle Polymerization

Cited by 7 publications

References 14 publications

Engineering of Micro‐ and Nanostructured Surfaces with Anisotropic Geometries and Properties

Engineering of Micro‐ and Nanostructured Surfaces with Anisotropic Geometries and Properties

Advanced multi-component nanostructures designed by dynamic shadowing growth

Nanotopographical control of surfaces using chemical vapor deposition processes

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