Brightness measurements of a ZrO/W Schottky electron emitter in a transmission electron microscope

Fransen, M.; Overwijk, M.H.F.; Kruit, P.

doi:10.1016/s0169-4332(99)00025-2

Cited by 31 publications

(23 citation statements)

References 8 publications

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“…Applications that rely on field emission will benefit, and such applications include (but are not limited to): electron beam lithography [22,23] and transmission electron microscopes [24]; spacecraft propulsion [25,26]; mm-wave Vacuum Electronic amplifiers and THz devices [27,28]; and particle accelerators and Free Electron Lasers (FEL's) [29][30][31].…”

Section: Introductionmentioning

confidence: 99%

Space charge effects in field emission: One dimensional theory

Rokhlenko

Jensen

Lebowitz

2010

Journal of Applied Physics

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The current associated with field emission is greatly dependent on the electric field at the emitting electrode. This field is a combination of the electric field in vacuum and the space charge created by the current. The latter becomes more important as the current density increases. Here, a study is performed using a modified classical 1D ChildLangmuir description that allows for exact solutions in order to characterize the contributions due to space charge. Methods to connect the 1D approach to an array of periodic 3D structures are considered.

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Section: Introductionmentioning

confidence: 99%

Space charge effects in field emission: One dimensional theory

Rokhlenko

Jensen

Lebowitz

2010

Journal of Applied Physics

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“…[Bab06 Car02 Lid04] Perhaps the most straightforward method to obtain the size and shape of a virtual electron source is to put the source as emitter in a TEM and use the column to make a highly magnified image of the source. [Fra99a] Once the probe size is known, it still includes contributions from diffraction and aberrations in addition to the desired source image intensity profile. But when the latter dominates the probe, the total size can be corrected with the RPS method (section 4.3) to yield the size of the virtual source.…”

Section: How To Get the Practical Brightness Of A Sourcementioning

confidence: 99%

“…B diff (0) can therefore not replace B to calculate the probe current with Eq. (4.14) as is done in [Fuj05b] nor should FW50 brightness measurements be compared to the differential values as is done in [Fra99a]. It is noted that the practical brightness can be increased (at the cost of beam current) by imaging the source onto a beam-limiting aperture that cuts off the tails of the intensity distribution.…”

Section: The Intrinsic Practical Brightness For Thermionic Schottky mentioning

confidence: 99%

Physics of Schottky Electron Sources

Bronsgeest¹

2016

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“…20,23,24 Perhaps, the most straightforward method to obtain the size and shape of a virtual electron source is to put the source as emitter in a transmission electron microscope and use the column to make a highly magnified image of the source. 25 Once the probe size is known, it still includes contributions from diffraction and aberrations in addition to the desired source image intensity profile. However, when the latter dominates the probe, the total size can be corrected with the root power sum ͑RPS͒ method ͑Sec.…”

Section: How To Get the Practical Brightness Of A Sourcementioning

confidence: 99%

“…31 nor should FW50 brightness measurements be compared to the differential values as is done in Ref. 25. As discussed before, the practical brightness can be increased ͑at the cost of beam current͒ by imaging the source onto a beam-limiting aperture that cuts off the tails of the intensity distribution.…”

Section: ͑8͒mentioning

confidence: 99%

Probe current, probe size, and the practical brightness for probe forming systems

Bronsgeest¹,

Barth²,

Swanson³

et al. 2008

Journal of Vacuum Science &Amp; Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena

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Probe size, shape, and current are important parameters for the performance of all probe forming systems such as the scanning ͑transmission͒ electron microscope, the focused ion beam microscope, and the Gaussian electron beam lithography system. Currently, however, the relation between probe current and probe size is ill defined. The key lies in a lacking definition of "size." This problem is solved with the introduction of the "practical brightness." In literature, many different definitions of "brightness" can be found, but for systems in which the whole of the virtual source is imaged onto the target, it is the practical brightness of a source that determines how much current is in the probe. This means that only with the practical brightness the performance of a probe forming system can be calculated quantitatively. The beauty of the practical brightness is that this source property is unaffected by the quality of the column: without interactions between electrons in the beam, the practical brightness is conserved down to the target. This makes it the only relevant brightness for probe forming systems to be used to compare different sources. The practical brightness can be measured, but can also be calculated when the source intensity profile is known. The Gaussian source intensity profile of thermionic, Schottky, and cold field emitters yields a practical brightness of 1.44ej / ͗͘, where j is the current density on the emitting surface and ͗͘ is the average tangential electron energy.

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Brightness measurements of a ZrO/W Schottky electron emitter in a transmission electron microscope

Cited by 31 publications

References 8 publications

Space charge effects in field emission: One dimensional theory

Space charge effects in field emission: One dimensional theory

Physics of Schottky Electron Sources

Probe current, probe size, and the practical brightness for probe forming systems

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