Broadband optical monitoring for a 2-meter optics magnetron sputtering deposition machine

Stojcevski, Dragan; Lequime, Michel; Chauveau, Grégory; Torricini, Didier; Grèzes-Besset, Catherine

doi:10.1117/12.898609

Cited by 7 publications

(5 citation statements)

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“…In particular, we have developed a broadband optical monitoring which allows recording a wide spectral range in real time and characterizing in-situ material parameters [9]. With a re-optimization of the design that can be made in real-time taking into account the previous layers, we can thus achieve optical performances with a good agreement with theory.…”

Section: A Coating Deposition Techniquementioning

confidence: 72%

Absorbing coating in magnetron sputtering for parasitic light reduction

Grèzes-Besset¹,

Krol²,

Chauveau³

et al. 2017

International Conference on Space Optics — ICSO 2014

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Section: A Coating Deposition Techniquementioning

confidence: 72%

Absorbing coating in magnetron sputtering for parasitic light reduction

Grèzes-Besset¹,

Krol²,

Chauveau³

et al. 2017

International Conference on Space Optics — ICSO 2014

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“…Moreover, PACA2M is equipped with a powerful broadband optical monitoring system that permits to produce sophisticated spectral specifications and a good agreement with theory, which will be presented in detail in another paper of the conference [1].…”

Section: Process Capabilitiesmentioning

confidence: 88%

PACA2M: magnetron sputtering for 2-meter optics

Chauveau¹,

Torricini²,

Grèzes-Besset³

et al. 2011

SPIE Proceedings

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In this paper, we present in detail the new deposition magnetron sputtering machine so-called PACA2M, that CILAS has implemented for coating large optics up to 2 meters, within a dedicated consortium, with the financial support of the French Department of Industry and of the local administrations, and with the help and the expertise of the French OPTITEC optical cluster.Our innovative large size deposition machine is equipped with 2.5 meters-long planar magnetrons (seven cathodes), to ensure uniform coating on large optical components, up to 2 meters by 2 meters, 40 centimetres thick and to 1.5 ton weight. Some magnetrons are adapted to a DC, Mid Frequency (MF) or Radio Frequency (RF) operation, which allows the deposition of metals and also dielectric oxides under reactive atmosphere. Moreover, PACA2M is equipped with a powerful broadband optical monitoring system that permits to reach sophisticated spectral specifications and a good agreement with theory, which will be presented in detail in another paper of the conference.As the magnetron sputtering technique leads to very dense layers close to bulk material, it is particularly well suited for applications that require environmental resistance, as for example the LMJ (Laser MegaJoule) French laser fusion program in which CILAS is in charge of the metallic mirrors on large complex-shaped reflectors for laser chains amplifiers.Numerous experimental results are presented here such as protected and enhanced metallic mirrors, metal-dielectric absorbing coatings or multi-dielectric coatings, deposited on different kinds of substrates, for which qualification tests have been done.

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“…Furthermore, optical monitors are adapted to a variety of process geometries, e.g. larger dimensions or planetary substrate holders [7,8].…”

Section: Monitoring Approachesmentioning

confidence: 99%