Calibration uncertainty of MEMS thermopile imagers for quantitative temperature measurement

Paes, Vitor Furtado; Mueller, Barbara A.; Costa, Priscila; Ferreira, Rafael A.M.; Porto, Matheus P.

doi:10.1016/j.infrared.2021.103978

Cited by 3 publications

(1 citation statement)

References 25 publications

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“…In 1995, Bergveld first introduced the possibility of large-scale equipment miniaturization for chemical analysis [9]. As MEMS devices are currently present in all aspects of the daily life (e.g., image [10], touch [11,12], distance [13], pressure [14][15][16][17][18], temperature [19][20][21], and humidity [22][23][24][25] sensors, microphones [26][27][28][29], gyroscopes [30][31][32][33], accelerometers [34][35][36][37], and magnetometers [38][39][40]), the worldwide MEMS market is expected to grow to $25 billion by 2022 (Figure 1) [3,4,[41][42][43]. Reprinted from an open-access source [43].…”

Section: Introductionmentioning

confidence: 99%

Microelectromechanical Systems (MEMS) for Biomedical Applications

Chircov

Grumezescu

2022

Micromachines

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The significant advancements within the electronics miniaturization field have shifted the scientific interest towards a new class of precision devices, namely microelectromechanical systems (MEMS). Specifically, MEMS refers to microscaled precision devices generally produced through micromachining techniques that combine mechanical and electrical components for fulfilling tasks normally carried out by macroscopic systems. Although their presence is found throughout all the aspects of daily life, recent years have witnessed countless research works involving the application of MEMS within the biomedical field, especially in drug synthesis and delivery, microsurgery, microtherapy, diagnostics and prevention, artificial organs, genome synthesis and sequencing, and cell manipulation and characterization. Their tremendous potential resides in the advantages offered by their reduced size, including ease of integration, lightweight, low power consumption, high resonance frequency, the possibility of integration with electrical or electronic circuits, reduced fabrication costs due to high mass production, and high accuracy, sensitivity, and throughput. In this context, this paper aims to provide an overview of MEMS technology by describing the main materials and fabrication techniques for manufacturing purposes and their most common biomedical applications, which have evolved in the past years.

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