Capacitance and Force Computation Due to Direct and Fringing Effects in MEMS/NEMS Arrays

Kambali, Prashant N.; Pandey, Ashok Kumar

doi:10.1109/jsen.2015.2480842

Cited by 22 publications

(12 citation statements)

References 16 publications

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“…The applied voltage was swept at the graphene beam and 0 V of fixed bias was applied to the gold bottom electrode to analyze the electrical field distribution at different voltages, while other boundaries are electrically insulated. Besides, the voltage potential ( V ) and the electrical field ( E ) in the vacuum condition can be acquired by solving the Poisson’s equation as given by [ 36 ]: −∇·(ε·∇ V ) = 0, where the derivatives are taken with respect to the spatial coordinates. This numerical model represents the electrical potential and its derivatives on a mesh, which is moving with respect to the spatial frame.…”

Section: Fem Simulation Results and Discussionmentioning

confidence: 99%

Three-Dimensional Finite Element Method Simulation of Perforated Graphene Nano-Electro-Mechanical (NEM) Switches

et al. 2017

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The miniaturization trend leads to the development of a graphene based nanoelectromechanical (NEM) switch to fulfill the high demand in low power device applications. In this article, we highlight the finite element (FEM) simulation of the graphene-based NEM switches of fixed-fixed ends design with beam structures which are perforated and intact. Pull-in and pull-out characteristics are analyzed by using the FEM approach provided by IntelliSuite software, version 8.8.5.1. The FEM results are consistent with the published experimental data. This analysis shows the possibility of achieving a low pull-in voltage that is below 2 V for a ratio below 15:0.03:0.7 value for the graphene beam length, thickness, and air gap thickness, respectively. The introduction of perforation in the graphene beam-based NEM switch further achieved the pull-in voltage as low as 1.5 V for a 250 nm hole length, 100 nm distance between each hole, and 12-number of hole column. Then, a von Mises stress analysis is conducted to investigate the mechanical stability of the intact and perforated graphene-based NEM switch. This analysis shows that a longer and thinner graphene beam reduced the von Mises stress. The introduction of perforation concept further reduced the von Mises stress at the graphene beam end and the beam center by approximately ~20–35% and ~10–20%, respectively. These theoretical results, performed by FEM simulation, are expected to expedite improvements in the working parameter and dimension for low voltage and better mechanical stability operation of graphene-based NEM switch device fabrication.

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Section: Fem Simulation Results and Discussionmentioning

confidence: 99%

Three-Dimensional Finite Element Method Simulation of Perforated Graphene Nano-Electro-Mechanical (NEM) Switches

et al. 2017

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“…For the electric field analysis at different voltages, a constant bias of 0 V was applied to the bottom electrode (Au) and the voltage applied at the top electrode (graphene beam) was swept. The potential, V , and the electric field, E , in the free space can be obtained by solving Poisson’s equation [ 28 ]. Figure 6 a shows the cross-sectional view of the electric field distribution across the center of the NEM switch for the applied voltage of 1 V to the bottom electrode.…”

Section: Finite Element Methods Simulation Results and Discussionmentioning

confidence: 99%

3D Finite Element Simulation of Graphene Nano-Electro-Mechanical Switches

2016

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In this paper, we report the finite element method (FEM) simulation of double-clamped graphene nanoelectromechanical (NEM) switches. Pull-in and pull-out characteristics are analyzed for graphene NEM switches with different dimensions and these are consistent with the experimental results. This numerical model is used to study the scaling nature of the graphene NEM switches. We show the possibility of achieving a pull-in voltage as low as 2 V for a 1.5-μm-long and 3-nm-thick nanocrystalline graphene beam NEM switch. In order to study the mechanical reliability of the graphene NEM switches, von Mises stress analysis is carried out. This analysis shows that a thinner graphene beam results in a lower von Mises stress. Moreover, a strong electrostatic force at the beam edges leads to a mechanical deflection at the edges larger than that around the center of the beam, which is consistent with the von Mises stress analysis.

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“…When the fringe effect is taken into consideration, the electric charge densities also exist along the edges of the plates and the distribution is not uniform; thus, the calculation of the plate capacitance becomes complex. According to the existing literature, a few empirical formulas have been proposed using different methods to calculate the capacitance of the parallel plate capacitor when the fringe effect is under consideration [ 27 , 28 , 29 ]; however, there is no general method for calculating it accurately. Nishiyama et al [ 30 ] presented an empirical formula to calculate the capacitance of parallel plate ring capacitors:

…”

Section: Detection Modementioning

confidence: 99%

A Novel On-Chip Impedance Sensor for the Detection of Particle Contamination in Hydraulic Oil

et al. 2017

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A novel impedance sensor based on a microfluidic chip is presented. The sensor consists of two single-layer coils and a straight micro-channel, and can detect, not only ferromagnetic and non-ferromagnetic particles in oil as an inductive sensor, but also, water droplets and air bubbles in oil as a capacitive sensor. The experiments are carried out at different excitation frequencies, number of coil turns and particle sizes. For the inductance detection, the inductance signals are found to increase with the excitation frequency and the noise is constant; both the inductance signals and the noise increase with the number of coil turns, but because the noise increases at a faster rate than the signal, the signal-to-noise ratio decreases with the number of coil turns. We demonstrate the successful detection of 40 μm iron particles and 110 μm copper particles using the coil with 20 turns at the excitation frequency of 2 MHz. For the capacitance detection, capacitance signals decrease with the excitation frequency and the noise is constant; the capacitance signals decrease with the number of coil turns, while the noise increases, thus, the signal-to-noise ratio decreases with the number of coil turns. We can detect 100 μm water droplets and 180 μm bubbles successfully using the coil with 20 turns at the excitation frequency of 0.3 MHz.

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Capacitance and Force Computation Due to Direct and Fringing Effects in MEMS/NEMS Arrays

Cited by 22 publications

References 16 publications

Three-Dimensional Finite Element Method Simulation of Perforated Graphene Nano-Electro-Mechanical (NEM) Switches

Three-Dimensional Finite Element Method Simulation of Perforated Graphene Nano-Electro-Mechanical (NEM) Switches

3D Finite Element Simulation of Graphene Nano-Electro-Mechanical Switches

A Novel On-Chip Impedance Sensor for the Detection of Particle Contamination in Hydraulic Oil

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