Electrically deformable surfaces based on dielectric elastomers have recently demonstrated controllable microscale roughness, ease of operation, fast response, and possibilities for programmable control. Potential applications include marine anti-biofouling, dynamic pattern generation, and voltage-controlled smart windows. Most of these systems, however, exhibit limited durability due to irreversible dielectric breakdown. Lowering device voltage to avoid this issue is hindered by an inadequate understanding of the electrically-induced wrinkling deformation as a function of the deformable elastic film thickness. Here we report responsive surfaces that overcome these shortcomings: we achieve fault-tolerant behavior based on the ability to self-insulate breakdown faults, and we enhance fundamental understanding of the system by quantifying the critical field necessary to induce wrinkles in films of different thickness and comparing to analytical models. We also observe new capabilities of these responsive surfaces, such as field amplification near local breakdown sites, which enable actuation and wrinkle pattern formation at lower applied voltages. We demonstrate the wide applicability of our responsive, fault-tolerant films by using our system for adjustable transparency films, tunable diffraction gratings, and a dynamic surface template/factory from which various static micropatterns can be molded on demand.Dynamic control of surface topography and roughness is highly desired for its potential to accomplish what is difficult for traditional static surfaces to achieve, such as adjustable wettability 1 , smart adhesion 2 , antifouling abilities 3 , tunable light diffraction 4 , e-skin and stretchable devices 5,6 . Depending on the material's mechanical properties, such surfaces can show a variety of topographies during deformation, including wrinkling (or buckling), formation of localized ridges, period-doubling, creasing, and delamination 7,8 . Several methods have been used to induce such surface deformation, such as in-plane mechanical compression 9-11 , relaxation after depositing thin films on pre-stretched substrates [12][13][14][15][16][17] , thermal expansion mismatch after cooling thin films deposited on hot substrates [18][19][20][21][22] , ion irradiation 23,24 , differential swelling of film layers 2,[25][26][27][28][29] , and electric-field-induced deformation [30][31][32] . Among these various approaches, electric-field-induced deformation is particularly attractive due to its ability to reversibly actuate at high frequency and its potential for miniaturization and programmable control 33 . This type of deformation relies on the concept of voltage-induced electromechanical instability 34-39 , a phenomenon frequently observed in dielectric elastomer actuators (DEAs) [40][41][42][43][44][45] . Wang and Zhao, for example, have produced creased/cratered/wrinkled structures by immobilizing a DEA on a rigid substrate 32,46 . This DEA-like system is composed of four layers from top to bottom: a conductive li...