Capacitive microsensors for biochemical sensing based on porous silicon technology

Schöning, M. J.; Kurowski, A.; Thust, M.; Kordoš, P.; Schultze, J.W.; Lüth, H.

doi:10.1016/s0925-4005(99)00484-0

Cited by 76 publications

(33 citation statements)

References 8 publications

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“…[157]. Semiconductor techniques have also been introduced to the microfluidic system for detection and active control [158,159]. However, not all of them are suitable for droplet detection.…”

Section: Droplet Detectionmentioning

confidence: 99%

Manipulation of microfluidic droplets by electrorheological fluid

2009

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Microfluidics, especially droplet microfluidics, attracts more and more researchers from diverse fields, because it requires fewer materials and less time, produces less waste and has the potential of highly integrated and computer-controlled reaction processes for chemistry and biology. Electrorheological fluid, especially giant electrorheological fluid (GERF), which is considered as a kind of smart material, has been applied to the microfluidic systems to achieve active and precise control of fluid by electrical signal. In this review article, we will introduce recent results of microfluidic droplet manipulation, GERF and some pertinent achievements by introducing GERF into microfluidic system: digital generation, manipulation of "smart droplets" and droplet manipulation by GERF. Once it is combined with real-time detection, integrated chip with multiple functions can be realized.

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Section: Droplet Detectionmentioning

confidence: 99%

Manipulation of microfluidic droplets by electrorheological fluid

2009

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“…Since first attempts could already successfully prove the realisation of a Ag/AgCl reference electrode -also on the basis of macroporous silicon [5] -, the fabrication of a porous EIS array with an integrated reference might combine the benefits of silicon-compatible process technologies together with the preparation of chemically and/or biologically sensitive membrane materials.…”

Section: Electrochemical Characterisation Of the Porous Eis Sensorsmentioning

confidence: 99%

“…The use of porous instead of planar silicon as substrate material provides many advantages. Due to the large surface area of porous silicon [4], a simple miniaturisation of capacitive EIS (Electrolyte/Insulator/Semiconductor) sensors down to the µm scale is possible since the measuring signal (capacitance value) raises with increasing the effective sensor area [5]. Inside the pores sensing components, like biomolecules (e.g., enzymes) can be stable fixated to protect the sensor from a fast leaching out of the molecules that results in a higher mechanical stability.…”

Section: Introductionmentioning

confidence: 99%

A (Bio-)Chemical Field-Effect Sensor with Macroporous Si as Substrate Material and a SiO2 / LPCVD-Si3N4 Double Layer as pH Transducer

Schöning

Simonis

Ruge

et al. 2002

Sensors

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Macroporous silicon has been etched from n-type Si, using a vertical etching cell where no rear side contact on the silicon wafer is necessary. The resulting macropores have been characterised by means of Scanning Electron Microscopy (SEM). After etching, SiO 2 was thermally grown on the top of the porous silicon as an insulating layer and Si 3 N 4 was deposited by means of Low Pressure Chemical Vapour Deposition (LPCVD) as transducer material to fabricate a capacitive pH sensor. In order to prepare porous biosensors, the enzyme penicillinase has been additionally immobilised inside the porous structure. Electrochemical measurements of the pH sensor and the biosensor with an Electrolyte/Insulator/Semiconductor (EIS) structure have been performed in the Capacitance/Voltage (C/V) and Constant capacitance (ConCap) mode.

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“…This material has recently been discussed as a novel transducer material for chemical sensors and biosensors [1517]. This is due to the fact that the preparation of PS by means of an anodic etching process is fully compatible to the semiconductor processing in sensor fabrication [18].…”

Section: Introductionmentioning

confidence: 99%

Electrical Behaviour of Nanostructured Porous Silicon

Azim-Araghi¹,

Ashrafabadi²,

Kanjuri³

2012

Acta Phys. Pol. A

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The electrical behaviour of porous silicon layers has been investigated on one side of p-type silicon with various anodization currents, electrolytes, and times. Electron microscopy reveals the evolution of porous silicon layer morphology with variation in anodization time. In this work electrical conductivity of bulk silicon and porous layer which is formed by electrochemical etching is compared due to IV measurements and calculation of activation energy. We have also studied the dependence of porous silicon conductivity on fabrication conditions. Also the eect of the temperature on conduction of porous silicon at dierent frequencies is investigated. At last dependence of capacitance on the temperature was probed at 10 2 10 5 Hz frequency range.

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Capacitive microsensors for biochemical sensing based on porous silicon technology

Cited by 76 publications

References 8 publications

Manipulation of microfluidic droplets by electrorheological fluid

Manipulation of microfluidic droplets by electrorheological fluid

A (Bio-)Chemical Field-Effect Sensor with Macroporous Si as Substrate Material and a SiO2 / LPCVD-Si3N4 Double Layer as pH Transducer

Electrical Behaviour of Nanostructured Porous Silicon

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