“…It is generally admitted that the CL signal in semiconductors is proportional to the volume density of excess minority carriers [9,10,12]. Alternatively, excitation of CL spectra in oxides originate from the secondary electrons (and holes) generated by elastic and inelastic collisions induced by electron irradiation [15]. The CL signal is produced during trapping of these thermalized secondary electrons by electronic levels of defects and impurities in the band gap of the insulating oxide [4][5].…”