“…The results suggest that there is an optimum state of Cs/O 2 co-deposition with a low work function, and an oversupply of Cs and O 2 leads to an increase in the work function. 12,27,28) The maximum J measured at V C = 30 V for Al 0.5 Ga 0.5 N and Al 0.75 Ga 0.25 N emitter with low Si doping concentration of 1 × 10 18 cm −3 were 5.2 × 10 −4 A cm −2 (Cs(3)/O 2 (2)) and 5.8 × 10 −4 A cm −2 (Cs(3)/O 2 (2)), respectively, which values were about 14 and 11 times higher than those obtained with Cs-only deposition (Cs(1)/O 2 (0)), respectively. The maximum J measured at V C = 30 V for Al 0.5 Ga 0.5 N and Al 0.75 Ga 0.25 N emitter with high Si doping concentration of 6 × 10 18 cm −3 were 1.9 × 10 −3 A cm −2 (Cs(6)/O 2 (5)) and 2.1 × 10 −3 A cm −2 (Cs(6)/O 2 (5)), respectively, which values were about 90 times higher than those obtained with Cs-only deposition (Cs(1)/O 2 (0)), respectively.…”