Challenges and Issues of Using Polymers as Structural Materials in MEMS: A Review

Li, Yunjia

doi:10.1109/jmems.2018.2837684

Cited by 22 publications

(12 citation statements)

References 190 publications

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“…Piezoresistive sensors fabricated with the PDMS-based composite show a remarkable temperature dependence because of the elevated thermal expansion coefficient of the polymer (δL = 3.2 × 10 −4 °C−1 ). 37,38 We tested both our devices in a temperature range between room temperature and 70 °C and an increase of the electrical resistance was observed (Figure 6d). This variation is comparable to the linear deformation of around 2% presented in Figure 6a and is compatible with the thermal expansion of the polymer in the applied temperature range.…”

Section: Electrical Characterization Electrical Characterizationsmentioning

confidence: 97%

PDMS/Polyimide Composite as an Elastomeric Substrate for Multifunctional Laser-Induced Graphene Electrodes

Parmeggiani

Zaccagnini

Stassi

et al. 2019

ACS Appl. Mater. Interfaces

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Laser-induced graphene (LIG) emerged as one of the most promising materials for flexible functional devices. However, the attempts to obtain LIG onto elastomeric substrates never succeed, hindering its full exploitation for stretchable electronics. Herein, a novel polymeric composite is reported as a starting material for the fabrication of graphene-based electrodes by direct laser writing. A polyimide (PI) powder is dispersed into the poly(dimethylsiloxane) (PDMS) matrix to achieve an easily processable and functional elastomeric substrate, allowing the conversion of the polymeric surface into laser-induced graphene (LIG). The mechanical and electrical properties of the proposed material can be easily tuned by acting on the polyimide powder concentration. The reported procedure takes advantage from the simple casting process, typical of silicone elastomer, allowing to produce electrodes conformable to any kind of shape and surface as well as complex three-dimensional structures. Electrochemical capacitors and strain gauges are selected as flexible prototypes to demonstrate the multifunctional properties of the obtained LIG on the PDMS/PI composite substrate.

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Section: Electrical Characterization Electrical Characterizationsmentioning

confidence: 97%

PDMS/Polyimide Composite as an Elastomeric Substrate for Multifunctional Laser-Induced Graphene Electrodes

Parmeggiani

Zaccagnini

Stassi

et al. 2019

ACS Appl. Mater. Interfaces

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“…1,2 Silicon MEMS has continued to dominate due to the existing infrastructure, common manufacturing techniques, well characterised material behaviour and desirable electromechanical properties. 3 Despite this, silicon is not suitable for all applications and suffers from high manufacturing costs, especially for low volume production. 3,4 Polymer based MEMS, which has been gaining popularity since the early 2000s 5,6 with ink jet nozzles, 7 microfluidic moulds, 8 and imprint techniques 9 offers several advantages over traditional silicon MEMS.…”

Section: Introductionmentioning

confidence: 99%

“…3 Despite this, silicon is not suitable for all applications and suffers from high manufacturing costs, especially for low volume production. 3,4 Polymer based MEMS, which has been gaining popularity since the early 2000s 5,6 with ink jet nozzles, 7 microfluidic moulds, 8 and imprint techniques 9 offers several advantages over traditional silicon MEMS. Polymer MEMS are more environmentally friendly and cheaper to produce 3,4 and exhibit many advantageous physical properties including flexibility, chemical resistance and biocompatibility.…”

Section: Introductionmentioning

confidence: 99%

“…3,4 Polymer based MEMS, which has been gaining popularity since the early 2000s 5,6 with ink jet nozzles, 7 microfluidic moulds, 8 and imprint techniques 9 offers several advantages over traditional silicon MEMS. Polymer MEMS are more environmentally friendly and cheaper to produce 3,4 and exhibit many advantageous physical properties including flexibility, chemical resistance and biocompatibility. 10 However, polymer MEMS are currently lacking in viable paths to manufacturing, 11,12 while both polymer and silicon MEMS lack rapid prototyping tools.…”

Section: Introductionmentioning

confidence: 99%

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Rapid prototyping MEMS using Laminated Resin Printing

Jones

Moore

Best

et al. 2020

Emerging Digital Micromirror Device Based Systems and Applications XII

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Interest in MEMS fabrication has been growing for the last 50 years; however, the number and quality of tools supporting rapid prototyping in this industry are limited. Laminated resin printing (LRP) combines maskless projector-based lithography with 3D printing techniques to facilitate the rapid production of high-resolution polymer structures in three dimensions with no retooling required. By selectively metalising these structures, high value functional MEMS devices can be rapidly produced, tested and iterated. Microcircuits, enclosed mechanical systems and devices based on cantilevers and membranes have all been demonstrated using this technique.

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“…In particular, synthetic polymers have been considered promising biomaterials because they are compatible with biological environments; biocompatibility is one of the key aspects required in biomedical applications [8]. In addition to biocompatibility, polymeric materials possess some advantages, including chemical stability, good processability, and low production cost, allowing them to be widely used in various fields of engineering [9,10]. However, there are limits in certain biomedical applications where the semiconducting or metallic properties of biomaterials are essential, as conventional polymers are insulators.…”

Section: Introductionmentioning

confidence: 99%

Research Progress on Conducting Polymer-Based Biomedical Applications

2019

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Conducting polymers (CPs) have attracted significant attention in a variety of research fields, particularly in biomedical engineering, because of the ease in controlling their morphology, their high chemical and environmental stability, and their biocompatibility, as well as their unique optical and electrical properties. In particular, the electrical properties of CPs can be simply tuned over the full range from insulator to metal via a doping process, such as chemical, electrochemical, charge injection, and photo-doping. Over the past few decades, remarkable progress has been made in biomedical research including biosensors, tissue engineering, artificial muscles, and drug delivery, as CPs have been utilized as a key component in these fields. In this article, we review CPs from the perspective of biomedical engineering. Specifically, representative biomedical applications of CPs are briefly summarized: biosensors, tissue engineering, artificial muscles, and drug delivery. The motivation for use of and the main function of CPs in these fields above are discussed. Finally, we highlight the technical and scientific challenges regarding electrical conductivity, biodegradability, hydrophilicity, and the loading capacity of biomolecules that are faced by CPs for future work. This is followed by several strategies to overcome these drawbacks.

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Challenges and Issues of Using Polymers as Structural Materials in MEMS: A Review

Cited by 22 publications

References 190 publications

PDMS/Polyimide Composite as an Elastomeric Substrate for Multifunctional Laser-Induced Graphene Electrodes

PDMS/Polyimide Composite as an Elastomeric Substrate for Multifunctional Laser-Induced Graphene Electrodes

Rapid prototyping MEMS using Laminated Resin Printing

Research Progress on Conducting Polymer-Based Biomedical Applications

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