2006
DOI: 10.1016/j.tsf.2005.12.161
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Challenges in microcrystalline silicon based solar cell technology

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Cited by 123 publications
(62 citation statements)
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“…The formation of poly-Si films on transparent conductive oxides ͑TCOs͒, however, would be an appealing option, especially for the preparation of thin-film solar cells in superstrate configuration because they allow for a simple contacting scheme and light trapping. 8,9 In the case of cells based on a-Si: H or c-Si: H, ZnO:Al is a promising TCO material due to its high stability in hydrogen-rich plasmas. 10 Studies on the stability of ZnO:Al upon treatment at higher temperatures as used for the crystallization of Si have so far concentrated on annealing of thin films on glass under various conditions.…”
mentioning
confidence: 99%
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“…The formation of poly-Si films on transparent conductive oxides ͑TCOs͒, however, would be an appealing option, especially for the preparation of thin-film solar cells in superstrate configuration because they allow for a simple contacting scheme and light trapping. 8,9 In the case of cells based on a-Si: H or c-Si: H, ZnO:Al is a promising TCO material due to its high stability in hydrogen-rich plasmas. 10 Studies on the stability of ZnO:Al upon treatment at higher temperatures as used for the crystallization of Si have so far concentrated on annealing of thin films on glass under various conditions.…”
mentioning
confidence: 99%
“…These kinds of films are usually applied for the development of state-of-the-art amorphous and microcrystalline Si based single and multijunction solar cells. 9 The layers for the ALILE process ͑Al and a-Si͒ were deposited onto the ZnO:Al coated glass by dc magnetron sputtering in argon atmosphere at room temperature. The thicknesses of the Al layer and the a-Si layer were 300 and 375 nm, respectively.…”
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confidence: 99%
“…The boron-and phosphorous-doped (p-and n-) layers and the intrinsic (i-) layer have thicknesses of approximately 20 nm and 1 μm, respectively. More details on the preparation of our baseline solar cells can be found elsewhere [29]. An 80-nm-thick sputtered ZnO:Al layer and a 700-nm-thick evaporated Ag layer were used together as a back electrode.…”
Section: Methodsmentioning
confidence: 99%
“…[7][8][9][10][11] However, in 2002 a best-cell V oc of 580 mV was reported for c-Si: H solar cells prepared by hot wire deposition. 12 For very high frequency ͑VHF͒ plasma-deposited solar cells a best-cell V oc around 570 mV was reported in 2005 by the application of a hot wire ͑HW͒ deposited buffer layer between the p and i layers.…”
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confidence: 99%
“…The p-i-n solar cells were fabricated on texture-etched ZnO:Al coated glass 8,19 13 For all cells, the i-layer thickness ranged from 1.0 to 1.5 m. ZnO / Ag backcontacts of 1 ϫ 1 cm 2 in size defined the aperture area of the solar cells. A class A double-source solar simulator was used for solar cell characterization.…”
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confidence: 99%