1997
DOI: 10.1016/s0080-8784(08)60111-8
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Chapter 8 Ion Implantation and Thermal Annealing of III-V Compound Semiconducting Systems: Some Problems of III-V Narrow Gap Semiconductors

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“…Generally speaking, fluences above this range will introduce defects and crystallographic dislocations [18,25], and those below this range will have very few observable effects [26]. Variation of fluence could have an influence on the degradation behaviour of the material.…”
Section: Introductionmentioning
confidence: 99%
“…Generally speaking, fluences above this range will introduce defects and crystallographic dislocations [18,25], and those below this range will have very few observable effects [26]. Variation of fluence could have an influence on the degradation behaviour of the material.…”
Section: Introductionmentioning
confidence: 99%