Characterisation and microcorrosion of DLC ultrathin films with acetylene and ethylene source gases by PECVD

Abstract

Diamond like carbon (DLC) films were deposited by plasma enhanced chemical vapour deposition, whose purpose is in the application of the films to further improve read/write durability of next generation recording discs. The effects of acetylene (C 2 H 2 ) and ethylene (C 2 H 4 ) source gases and deposition parameters on roughness, structure, hardness, resistivity, silicone contamination, glide performance and microcorrosion measurement on the cobalt concentration of DLC films are studied utilising the following equipment: AFM, Raman, nanoindenter, resistivity gauge meter, phase metrics, time of flight SIMS and inductively coupled plasma mass spectroscopy. Results show that the Raman I d /I g ratio, G and D peak wavenumber, hardness, glide noise and avalanche, silicone contamination and cobalt concentration of the C 2 H 4 source gas films are significantly lower than those of C 2 H 2 gas. Diamond like carbon films prepared at the higher gas flow exhibit a lower I d /I g and cobalt concentration. Films deposited with a higher voltage bias and heater power will induce a higher I d /I g and cobalt concentration.

Characteristics of DLC/oxynitriding duplex-treated V8 tool steel by DC-pulsed PECVD

“…As a result, the sp 2 bond content is relatively increased. This result is also consistent with previous literature [18,[21][22][23].…”

“…As a result, the sp 2 bond content is relatively increased. This result is also consistent with previous literature [18, 21-23].

Figure 3 Comparison of the FT-IR spectrum of DLC films with different gas flows by DC-pulsed PECVD.

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