EuroSimE 2009 - 10th International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelect 2009
DOI: 10.1109/esime.2009.4938492
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Characterisation and modelling of the nanoindentation experiment in Au layers

Abstract: The nanoindentation experiment is an established technique for the determination of Hardness and Young's modulus of thin films. This standard data set is not sufficient to he used as input to finite element simulations, because elastic-plastic material data is being required for analysis of reliability of metal layers. Therefore stress-strain Curves are being determined by fitting the force displacement curves of the experiment with a finite-element model. Additionally this approach enables a solution for the … Show more

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