Characteristics of a Pt/NiO thin film-based ammonia gas sensor

Chen, Huey-Ing; Hsiao, Cheng-Yu; Chen, Wei-Cheng; Chang, Che-Wei; Chou, Tzu-Chieh; Liu, I-Ping; Lin, Kun-Wei; Liu, Wen‐Chau

doi:10.1016/j.snb.2017.10.032

Cited by 118 publications

(28 citation statements)

References 31 publications

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“…The structure is shown in Figure 4. Using RF sputtering method, a 30-nm NiO film was deposited over sapphire and subsequently 1-nm platinum film was deposited over it by thermal evaporation for the detection of ammonia efficiently at low concentration at elevated temperature [38]. Several such works with ultrathin film have been reported in the literature.…”

Section: Techniques Used For Thin Film Fabricationsmentioning

confidence: 99%

Environmental Gas Sensors Based on Nanostructured Thin Films

Sureshkumar¹,

Dutta²

2020

Multilayer Thin Films - Versatile Applications for Materials Engineering

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Since the discovery of electron microscopes, nanomaterials and nanotechnology have been influencing academic and industrial research greatly for bringing out newer and better products with improved materials' properties. In the field of environmental gas sensors too, the demonstration of nanomaterials for sensing various gases has become a common practice. Environmental gas pollution has turned out to be a huge concern in the society due to the progress of civilization. The awareness of health hazard for different toxic/polluting gases and rectification measure by imposing stricter norms has prompted extensive research to develop efficient gas sensors to detect trace level of pollution from various sources. Thin film, ultrathin film, and nanostructure materials of metal oxide semiconductor, polymer, metal, carbon nanotube, graphene, etc. with or without sensitizers have been investigated for sensing various toxic gases. New device structures have been fabricated to achieve high sensitivity, selectivity, fast response, etc. The microstructure and thickness of film are found to influence the performance greatly. Various methods of preparations and mechanism of sensing are being explored. All these aspects and the challenges were discussed in this chapter.

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Section: Techniques Used For Thin Film Fabricationsmentioning

confidence: 99%

Environmental Gas Sensors Based on Nanostructured Thin Films

Sureshkumar¹,

Dutta²

2020

Multilayer Thin Films - Versatile Applications for Materials Engineering

View full text Add to dashboard Cite

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“…There are several ammonia detection devices described in the literature. Among those, optical gas analyzers [ 4 , 5 , 6 ], catalytic ammonia sensors [ 1 ], metal-oxide gas sensors [ 7 , 8 ], conducting polymer gas detectors [ 9 , 10 , 11 ], and chemiresistive sensors based on carbon nanomaterials and two-dimensional (2D) transition metal dichalcogenides [ 12 ] are used for the detection of gaseous ammonia, with their virtues and shortcomings. Electrolytic devices usually suffer from their low detection limits and limited accuracy, while optical sensors have very good sensitivity, but they are usually suited only for laboratory testing rather than for low cost portable sensors.…”

Section: Introductionmentioning

confidence: 99%

Fluorinated Metal Phthalocyanines: Interplay between Fluorination Degree, Films Orientation, and Ammonia Sensing Properties

Klyamer

Sukhikh

Gromilov

et al. 2018

Sensors

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In this work, the sensor response of MPcFx (M = Cu, Co, Zn; x = 0, 4, 16) films toward gaseous NH3 (10–50 ppm) was studied by a chemiresistive method and compared to that of unsubstituted MPc films to reveal the effects of central metals and F-substituents on the sensing properties. A combination of atomic force microscopy and X-ray diffraction techniques have been used to elucidate the structural features of thin MPcFx films deposited by organic molecular beam deposition. It has been shown that the sensor response of MPcF4 films to ammonia is noticeably higher than that of MPc films, which is in good correlation with the values of binding energy between the metal phthalocyanine and NH3 molecules, as calculated by the density functional theory (DFT) method. At the same time, in contrast to the DFT calculations, MPcF16 demonstrated the lesser sensor response compared with MPcF4, which appeared to be connected with the different structure and morphology of their films. The ZnPcF4 films were shown to exhibit a sensitivity to ammonia up to concentrations as low as 0.1 ppm, and can be used for the selective detection of ammonia in the presence of some reducing gases and volatile organic compounds. Moreover, the ZnPcF4 films can be used for the detection of NH3 in the gas mixture simulating exhaled air (N2 76%, O2 16%, H2O 5%, and CO2 3%).

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“…Metallic or low band gap nanoparticles serve as the nanoelectrodes [28]. Deposition of metallic nanoelectrodes on the solid state gas sensors can influence the sensitivity of them [28,29]. Therefore, in this study, Ag nanolayers were deposited on NiO thin films and the objective of the present study is investigating the effects of Ag layer thickness on the crystalline structure, surface morphology, and optical properties of Ag/NiO thin films.…”

Section: Introductionmentioning

confidence: 99%

Effect of silver thickness on structural, optical and morphological properties of nanocrystalline Ag/NiO thin films

2018

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Silver (Ag) nanolayers were deposited on nickel oxide (NiO) thin films by DC magnetron sputtering. The thickness of Ag layers was in range of 20-80 nm by variation of deposition time between 10 and 40 s. X-ray diffraction results showed that the crystalline properties of the Ag/NiO films improved by increasing the Ag film thickness. Also, atomic force microscopy and field emission scanning electron microscopy images demonstrated that the surface morphology of the films was highly affected by film thickness. The film thickness and the size of particles change by elevating the Ag deposition times. The composition of films was determined by Rutherford back scattering spectroscopy. The transmission of light was gradually reduced by augmentation of Ag films thickness. Furthermore; the optical band gap of the films was also calculated from the transmittance spectra.

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Characteristics of a Pt/NiO thin film-based ammonia gas sensor

Cited by 118 publications

References 31 publications

Environmental Gas Sensors Based on Nanostructured Thin Films

Environmental Gas Sensors Based on Nanostructured Thin Films

Fluorinated Metal Phthalocyanines: Interplay between Fluorination Degree, Films Orientation, and Ammonia Sensing Properties

Effect of silver thickness on structural, optical and morphological properties of nanocrystalline Ag/NiO thin films

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