2013
DOI: 10.1016/j.apsusc.2012.09.159
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Characteristics of the electromagnetic interference shielding effectiveness of Al-doped ZnO thin films deposited by atomic layer deposition

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Cited by 80 publications
(39 citation statements)
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“…However, due to low conductivity, of late ZnO is doped with metal cation and its EMI shielding properties are studied. Choi et al have reported that on doping Al with ZnO EMI shielding improved six times [22] . ZnO when doped with highly transparent and conducting 3d transition metal turns out to be a promising material for the emerging field of diluted magnetic semiconductors (DMS) which has made possible to fabricate electrical or optical structures with controlled ferromagnetism.…”
Section: Introductionmentioning
confidence: 98%
“…However, due to low conductivity, of late ZnO is doped with metal cation and its EMI shielding properties are studied. Choi et al have reported that on doping Al with ZnO EMI shielding improved six times [22] . ZnO when doped with highly transparent and conducting 3d transition metal turns out to be a promising material for the emerging field of diluted magnetic semiconductors (DMS) which has made possible to fabricate electrical or optical structures with controlled ferromagnetism.…”
Section: Introductionmentioning
confidence: 98%
“…ions (Al Zn ) or from an association of donor sites with oxygen vacancies. Chemical reduction or intentional doping can easily create these donor sites [9]. The films resistivity q is mainly affected by carrier concentration N and the mobility l with the following relation…”
Section: Electrical Characteristicsmentioning
confidence: 99%
“…The films present good thermal stability, they are abundant, non toxic and not expensive [6]. The mostly used ZnO:Al thin film has been prepared with various methods: radio frequency (RF) sputtering [7], pulsed laser deposition [8], atomic layer deposition and chemical vapor deposition [9]. Many authors have studied the RF sputtering of ZnO:Al target [10][11][12][13].…”
Section: Introductionmentioning
confidence: 99%
“…Conventional, electromagnetic interference (EMI) shielding is using braided/foil-type or solid metal but they are bulky and also they are conductor [3], [4]. It will impose electric safety issue because of the metal shielded may cause electrocution.…”
Section: Introductionmentioning
confidence: 99%