Characterization and Design Evaluation of Membrane-Based Calorimetric MEMS Sensors for Two-Dimensional Flow Measurement

Hartgenbusch, Nico; Borysov, Mykhailo; Jedermann, Reiner; Lang, Walter

doi:10.1109/jsen.2020.2965332

Cited by 12 publications

(3 citation statements)

References 17 publications

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“…In 2010, the cooperation broadened to an Innovation Alliance with 15 industrial and 6 research partners, leading to the publication of a dedicated theme issue on 'Intelligent Food Logistics' in 2014 (Jedermann et al 2014a). Subsequent projects covered the analyses of airflow conditions in cold storage warehouses by wireless anemometers (Hartgenbusch et al 2020), the detection of ethylene by micro-fabricated gas sensors (Sklorz et al 2012a,b) and the detection of fungi spores (Papireddy .…”

Section: Project Historymentioning

confidence: 99%

15 Years of Intelligent Container Research

Jedermann

Lang

2021

Dynamics in Logistics

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Food losses in the cool chain, which are mostly caused by temperature deviations, can be reduced by remote monitoring of transport conditions. The project ‘Intelligent Container’ was begun 15 years ago to provide the necessary sensor system, communication and automated evaluation of data. If transport and delivery planning are adjusted according to the actual quality or the predicted remaining shelf life, more products arrive with sufficient quality at the customers. This paper summarizes the project results and highlights current trends in industrial application and research, such as commercial remote container monitoring and standards for data exchange, sub-GHz communication, the increasing availability of biological and computational fluid dynamics models and digital twins. Open research topics include the development of specialized sensors. To overcome obstacles hindering the industrial application of sensor quality monitoring, we suggest a gradual approach, with lower company resources required for the first action points. Food losses can be reduced, even if the complete system, including permanent remote access and adaptive stock rotation, is not applied.

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Section: Project Historymentioning

confidence: 99%

15 Years of Intelligent Container Research

Jedermann

Lang

2021

Dynamics in Logistics

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“…They can be categorized by the employed temperature sensing technology. Thermoelectric transduction [ 1 , 2 , 3 , 4 , 5 , 6 ] and thermoresistive technologies [ 7 , 8 , 9 , 10 , 11 , 12 , 13 ] are very frequently used. Several excellent review articles are available on various aspects of 2D micromachined flow transducers [ 14 , 15 , 16 , 17 ].…”

Section: Introductionmentioning

confidence: 99%

The Impact of Surface Discontinuities on MEMS Thermal Wind Sensor Accuracy

Talic

Ćerimović

Beigelbeck

et al. 2023

Sensors

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A 2D calorimetric flow transducer is used to study distortions of the flow velocity field induced by small surface discontinuities around the chip. The transducer is incorporated into a matching recess of a PCB enabling wire-bonded interconnections to the transducer. The chip mount forms one wall of a rectangular duct. Two shallow recesses at opposite edges of the transducer chip are required for wired interconnections. They distort the flow velocity field inside the duct and deteriorate the flow setting precision. In-depth 3D-FEM analyses of the setup revealed that both the local flow direction as well as the surface-near distribution of the flow velocity magnitude deviate significantly from the ideal guided flow case. With a temporary leveling of the indentations, the impact of the surface imperfections could be largely suppressed. Including a yaw setting uncertainty of about ±0.5°, a peak-to-peak deviation of 3.8° of the transducer output from the intended flow direction was achieved with a mean flow velocity of 5 m/s in the duct corresponding to a shear rate of 2.4·104 s−1 at the chip surface. In view of the practical compromises, the measured deviation compares well with the peak-to-peak value of 1.74° predicted by previous simulations.

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“…The cavity below the structure maximizes the isolation of sensitive film and bulk silicon, which can greatly enhance the absorption of light, the heat of the sensitive materials, and the specific recognition effect about chemical components to improve the sensitivity of light detectors, heat detectors, chemical detectors and gas detectors [1,2]. The traditional suspended structures are divided into the plane structure [3] and bridge structure [4]: suspended part of the plane structure has the same height as the supporting part and can be prepared by the front etching method or back etching method. Bridge structure, which is in the shape of a slightly raised bridge above Si substrate, can be made of suspended material on the sacrificial layer.…”

Section: Introductionmentioning

confidence: 99%

A Si-based suspended tunnel structure with trapezoidal section by two-step etching

Ma¹,

Wang²,

Zhou³

2022

J. Micromech. Microeng.

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Two - step etching method is used to prepare Si-based suspended tunnel structure with trapezoidal section. In the first wet etching, surfactant Triton-X-100 is added to TMAH enchant to inhibit crystal plane characteristics. Bulk Si Rib with trapezoidal cross section is formed, with inclination of side and height being modulated by changing etching time, so as to obtain good stability. After SiO2 support layer is grown by thermal oxidation, pure 25%TMAH is used in the second wet etching to quickly lateral etch and undercut the bulk silicon under the support layer and form a suspended structure along <100> opening. Using additive-no additive two-step etching method, suspended structure with high stability and compressive strength, good insulation characteristics, high yield can be prepared. It lays a solid foundation for the development of high sensitivity photo, thermal, chemical and gas sensors.

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Characterization and Design Evaluation of Membrane-Based Calorimetric MEMS Sensors for Two-Dimensional Flow Measurement

Cited by 12 publications

References 17 publications

15 Years of Intelligent Container Research

15 Years of Intelligent Container Research

The Impact of Surface Discontinuities on MEMS Thermal Wind Sensor Accuracy

A Si-based suspended tunnel structure with trapezoidal section by two-step etching

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