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We demonstrate the design and implementation of hybrid optical-electrical probes (`optrodes') for high resolution electrophysiology and optogenetic stimulation of neurons in multiple brain areas. Our 64-channel implantable optrodes are minimally invasive (50 μm × 20 μm) and span 1~2 mm. To minimize tethering forces on the brain tissue a monolithic high-density flexible cable (6 μm thin) connects the probe to a lightweight headstage (1.3 gr, 256 channel configuration) designed for awake, freely-behaving small animals. A polymer-based multi-channel photonic light delivery system is integrated on shank in a separate layer, providing local optogenetic stimulation of the neural population adjacent to the probe. The entire manufacturing process, including the nanofabrication of the optrodes, post-fabrication assembly, and surgical implantation procedures are designed to be scalable, high-yield, and high-throughput.

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