Characterization and post simulation of thin-film PZT actuated plates for haptic applications

Abstract

ISBN : 978-1-4799-4791-1International audienceThe tremendous development of tactile interface in many customers' applications such as Smartphone, tablet PC or touch pad leads industrials to study “haptic interfaces” or “touch screen” solutions. This technology is already used but with limitations such as high power consumption and limited feedback effect (simple vibration). PZT is a good candidate for many actuator applications due to its high piezoelectric coefficient. In particular, it can be used for haptic interfaces to create squeeze-film effect. It consists in changing the friction between the finger and a plate resonator. It provides high granularity level of haptic sensation (texture rendering), using low power consumption compared to existing solutions. We manufactured demonstrators using a generic technology. We proved the concept through electro-mechanical characterizations and haptic feedback effect was noticeable with one's finger on our thin-film PZT demonstrators. In this paper, we presented the characterization and post-simulation of PZT-actuated plates with various actuator configurations. Measurement results, in good agreement with simulation, indicate that 2 actuator columns separated by a wavelength allow obtaining the highest substrate displacement amplitudes

Electromechanical Actuators for Haptic Feedback with Fingertip Contact

“…With the decrease in thicknesses and design of the bending structure, thin film actuators could reach the same displacements of tens to hundreds of microns at a lower voltage [142]. In the report by F. Casset et al [143,144], 450 nm displacement was achieved using sol-gel PZT thin film deposited on silicon wafers under 4 V, which was estimated to be further raised to 1 µm under 10 V using Finite Element Method simulation. This indicated the probability of a lower driving voltage.…”

4-inch transparent plates based on thin-film AlN actuators for haptic applications

“…To promote the desired mode, we use piezoelectric actuators and bimorph effect. We developed Finite Element Method (FEM) models and proved the concept using thin-film PZT actuators deposited on silicon substrate [9][10] . Nevertheless, to address transparency, low temperature process was used, to deposit AlN actuators directly on transparent glass substrate [11] .…”