2012
DOI: 10.1088/0963-0252/21/5/055010
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Characterization of an argon radiofrequency plasma jet discharge continuously passing from low to atmospheric pressure

Abstract: We present results describing the behavior of a radiofrequency plasma jet discharge with bare electrodes generated in argon during a continuous pressure increase from low (10 mbar) to atmospheric pressure (1000 mbar). Both the interelectrodic space and the expansion plasma regions were studied by means of imagistic, electrical and spectral methods. It is shown that different operation regimes are encountered when pressure changes from low to atmospheric values, with a quasi-unstable or smooth transition betwee… Show more

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Cited by 11 publications
(16 citation statements)
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“…Its high luminosity indicates that most of the discharge current is transported through this column. Although in the configuration used here the plasma in the electrode vicinity is not visible; in a previous paper we have shown that this plasma column is anchored in a fixed position on the surface of the electrode. The SEM image (Figure b) demonstrates that the power (100 W) used in the experiment is high enough to create local melting of electrode, accompanied by metal vaporization.…”
Section: Resultsmentioning
confidence: 94%
See 1 more Smart Citation
“…Its high luminosity indicates that most of the discharge current is transported through this column. Although in the configuration used here the plasma in the electrode vicinity is not visible; in a previous paper we have shown that this plasma column is anchored in a fixed position on the surface of the electrode. The SEM image (Figure b) demonstrates that the power (100 W) used in the experiment is high enough to create local melting of electrode, accompanied by metal vaporization.…”
Section: Resultsmentioning
confidence: 94%
“…Plasma expands through the nozzle into a processing chamber. A detailed description of the working principle of the plasma jet and of the setup is made elsewhere . For our study the powered electrode had a hollow design, was made out of copper, and was connected to a 13.56 MHz generator.…”
Section: Methodsmentioning
confidence: 99%
“…Nowaday constructed RF sources tested for use in large scale applications [17] can be classified mainly into two categories, considering the configuration of electrodes: one type is Dielectric Barrier Discharge (DBD), uses a dielectric barrier at one or at both electrodes [18,19] and the second type, Discharge with Bare Electrodes (DBE), having both electrodes in contact with the plasma [20,21]. For these two types of plasma sources there is no comparative study of the plasma parameters and effect of dielectric barrier on the discharge performance.…”
Section: Introductionmentioning
confidence: 99%
“…Figure presents the photos of the Argon plasma jet obtained in the processing chamber at atmospheric pressure for powers between 60 and 100 W. It is clearly observed that the length and diameter of the columnar plasma region depends on the RF power. The most pronounced columnar region is seen for 80 W, which is longer when compared with the columnar regions obtained at 90 and 100 W and more obvious when compared with the columnar regions acquired at 60 and 70 W. The diffuse region is seen surrounding the columnar region, regardless of the RF power …”
Section: Resultsmentioning
confidence: 67%
“…When looking at the copper electrode's surface, see Figure , one can notice that after the plasma exposure the surface modifies its appearance and a damaged spot is observed. Teodorescu et al proved that the plasma columnar region is anchored in a fixed position at the electrode's surface. We observed that this can cause the appearance of the local erosion spot .…”
Section: Resultsmentioning
confidence: 99%