Characterization of (Ba, Sr)RuO3 films deposited by metal organic chemical vapor deposition

Kim, Hyun-Chul; Kim, Yoon-Su; Kim, Young‐Bae; Choi, Duck–Kyun

doi:10.1016/j.jnoncrysol.2004.01.004

Cited by 4 publications

(3 citation statements)

References 17 publications

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“…The ferroelectric property of these materials is well known to be strongly reliant on the electrode materials. Different forms of conductive materials have also been investigated, but ruthenate oxides such as SrRuO 3 [ 127 ] and (Ba,Sr)RuO 3 [ 128 ] are unquestionably the best. Other common conductive perovskites such as LaNiO 3 [ 129,130 ] and LaCoO 3 or Sr‐doped LaCoO 3 [ 131 ] have been studied as good electrode materials for the deposition of highly epitaxial ferroelectric and piezoelectric oxides in thin‐film form.…”

Section: Mocvd Growth Of Perovskites On Non‐single Crystal Substratesmentioning

confidence: 99%

Metal‐Organic Chemical Vapor Deposition of Oxide Perovskite Films: A Facile Route to Complex Functional Systems

Presti

Pellegrino

Malandrino

2022

Adv Materials Inter

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Perovskite oxide type materials exhibit a great profusion of unique functional properties and for this reason they have been named inorganic chameleon. Nevertheless, their actual applications require the availability of these systems in thin‐film form synthesized through a simple, scalable, and straightforward technique. Metal‐organic chemical vapor deposition (MOCVD) has been shown to be an outstanding process to prepare thin films of multi‐component oxides. Herein, the focus is devoted to oxide perovskite thin films on both single crystal and non‐single crystal substrates through MOCVD processes. This study discusses the principles and the basic rules governing conventional, plasma‐enhanced, and liquid‐assisted MOCVD processes. Among a plethora of oxide perovskites, several classes of functionalities belonging to the perovskite class: from superconductors to dielectrics and giant‐k dielectrics, from colossal magnetoresistance to ionic conductors, piezoelectrics and ferroelectrics, are explored in detail.

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Section: Mocvd Growth Of Perovskites On Non‐single Crystal Substratesmentioning

confidence: 99%

Metal‐Organic Chemical Vapor Deposition of Oxide Perovskite Films: A Facile Route to Complex Functional Systems

Presti

Pellegrino

Malandrino

2022

Adv Materials Inter

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“…3), 4) BSRO thin films have been prepared by MOCVD 11) and co-sputtering. 12) Although the relationship between the lattice parameter perpendicular to the surface (c-axis length) and the electrical conductivity of epitaxial BSRO thin films grown on (001) SrTiO 3 substrate has been reported, the effect of Ba substitution in SRO thin film on the microstructure and electrical property of non-constrained BSRO thin film should be studied to realize its practical use as a thin film electrode and conductive paste.…”

Section: Introductionmentioning

confidence: 99%

“…12) Although the relationship between the lattice parameter perpendicular to the surface (c-axis length) and the electrical conductivity of epitaxial BSRO thin films grown on (001) SrTiO 3 substrate has been reported, the effect of Ba substitution in SRO thin film on the microstructure and electrical property of non-constrained BSRO thin film should be studied to realize its practical use as a thin film electrode and conductive paste. BSRO thin films prepared by MOCVD have been found to contain a significant amount of BaCO 3 and metallic Ru, 11) and therefore the Ba substitution effect on the lattice parameter and electrical conductivity of polycrystalline BSRO thin film has not been understood.…”

Section: Introductionmentioning

confidence: 99%

Effect of Ba substitution on the microstructure and electrical conductivity of BaxSr1-xRuO3 thin films prepared by laser ablation

Ito

Masumoto

Goto

2008

J. Ceram. Soc. Japan

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Ba x Sr 1-x RuO 3 (BSRO) thin films were prepared by laser ablation on quartz substrates at a substrate temperature (T sub ) of 973 K and an oxygen pressure (PO 2 ) of 13 Pa. The effect of Ba substitution for Sr on the microstructure and electrical conductivity (s) was investigated. (110)-oriented pseudo-cubic BSRO thin films were obtained at a Ba substitution ratio (x) below 0.5. The thin films prepared at x＝0.6 to 0.8 had the 4H-type BaRuO 3 (BRO) structure, whereas 9R BRO thin films were obtained at x＝1.0. The BSRO thin films consisted of well-crystallized fine grains. The pseudo-cubic lattice parameter of the BSRO thin films increased linearly from 0.393 to 0.407 with increasing x. The BSRO thin films showed metallic conduction, and the s decreased due to lattice expansion with increasing x. 2008 The Ceramic Society of Japan. All rights reserved.Key-words : Laser ablation, Strontium ruthenate, Barium ruthenate, Thin films, substitution effect, Microstructure, Electrical conductivity [Received November 28, 2007; Accepted February 21, 2008] 1. Introduction SrRuO 3 (SRO) and BaRuO 3 (BRO) are useful materials as conductive paste and electrodes for micro devices because of their excellent high conductivity. 1)-3) Since the lattice parameter of pseudo-cubic perovskite SRO (a＝0.393 nm) is close to those of dielectric perovskites such as SrTiO 3 (Pm3m; a＝0.391 nm), BaTiO 3 (P4mm; a＝0.394 nm, c＝ 0.395 nm) and Pb(Zr 0.52 Ti 0.48 )O 3 (PZT, P4mm; a＝0.404 nm, c＝4.14 nm), SRO is a promising candidate for use as an alternative conductive oxide electrode replacing metal electrode such as Pt. 4),5) On the other hand, BRO is a hexagonal perovskite. The 9R-type BRO structure (R˜3m: a＝ 0.575 nm, c＝2.161 nm), 6),7) and the 4H-(P6 3 /mmc: a＝ 0.574, c＝0.950 nm) and 6H-type BRO structures (P6 3 / mmc: a＝0.574, c＝1.405 nm) 8) are constructed from three and two face-sharing RuO 6 octahedra combined with cornersharing RuO 6 octahedra, respectively. 9R BRO is commonly prepared under normal conditions, whereas 4H and 6H BRO might be prepared at high pressures.

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Depositions of SrRuO3 thin films on oxide substrates with liquid-delivery spin MOCVD

Schwarzkopf¹,

Dirsyte²,

Devi³

et al. 2010

Thin Solid Films

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Characterization of (Ba, Sr)RuO3 films deposited by metal organic chemical vapor deposition

Cited by 4 publications

References 17 publications

Metal‐Organic Chemical Vapor Deposition of Oxide Perovskite Films: A Facile Route to Complex Functional Systems

Metal‐Organic Chemical Vapor Deposition of Oxide Perovskite Films: A Facile Route to Complex Functional Systems

Effect of Ba substitution on the microstructure and electrical conductivity of BaxSr1-xRuO3 thin films prepared by laser ablation

Depositions of SrRuO3 thin films on oxide substrates with liquid-delivery spin MOCVD

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