Characterization of diamond films deposited on Re substrate by magnetic field-assisted hot filament chemical vapor deposition

Yu, Zhaoju; You, Xiao‐Zeng; Tian, Mengkun; Gong, Yilun

doi:10.1016/j.apsusc.2011.03.131

Cited by 5 publications

(1 citation statement)

References 17 publications

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“…Cyclic voltammograms showed that the deposited boron-doped diamond electrodes presented a wide window and a low baseline current. They continued to deposit a diamond film on a Re substrate by magnetic field-assisted HFCVD and investigated the field emission properties [10]. The turn-on voltage of the diamond film was lowered to 2.6 V/µm, while the emission current density was advanced to 21.5 µA/cm 2 (at 6.2 V/µm).…”

Section: Introductionmentioning

confidence: 99%

CVD Diamond Growth Enhanced by a Dynamic Magnetic Field

et al. 2023

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A dynamic magnetic field (DMF) with different angular frequencies (50, 100, and 150 π rad/s) was introduced during diamond growth via hot filament chemical vapor deposition (HFCVD). The effects of the dynamic magnetic field on the growth rate, diamond quality, growth orientation, and deposition uniformity of large-area diamond films were investigated with scanning electron microscopy (SEM), X-ray diffractometry (XRD), and Raman spectroscopy. The correlation between diamond growth and angular frequency was discussed. The results showed that a faster growth rate (about 2.5 times) and higher diamond quality were obtained by increasing the angular frequency of the DMF. A (100) textured polycrystalline diamond film was achieved, and the preferential orientation was found to evolve from (110) to (100), while the expected uniform deposition of a large-area diamond film under DMF was not achieved. The enhancement effect of the DMF was ascribed to the activation of more gas molecules, which participated in CVD diamond growth.

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Section: Introductionmentioning

confidence: 99%