Characterization of Electric Discharge Machining for Silicon Carbide Single Crystal

Kato, Tomohisa; Noro, Toshiya; Takahashi, Hideaki; Yamaguchi, S.; Arai, Kazuo

doi:10.4028/www.scientific.net/msf.600-603.855

Cited by 25 publications

(14 citation statements)

References 4 publications

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“…Yamada et al [3] has found that wire electrical discharge machining (EDM) slicing of SiC could achieve a higher cutting speed and a lower surface warpage than diamond multi-wire saw. Kato et al [4] reported that wire EDM could result in a lower surface damage layer of SiC compared to the surface machined by a mechanical polishing process using diamond fine abrasive of 0.25 μm particle size. In their study, the EDM'd surface of SiC wafer became atomically flat surfaces after removing a layer of about 10∼25 μm thick from the EDM'd top surface.…”

Section: Introductionmentioning

confidence: 99%

Comparison on foil EDM characteristics of single crystal SiC between in deionized water and in EDM oil

Zhao

Kunieda

Abe

2016

Int J Adv Manuf Technol

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Slicing of single crystal silicon carbide (SiC) wafers by commonly used abrasive wire saw method is very time and cost consuming due to its extreme high hardness. This problem becomes more serious with the increase of SiC ingot diameter. Therefore, electrical discharge machining (EDM), which is a thermal process regardless of workpiece hardness, is developing as an alternative method for slicing SiC. In this study, EDM of SiC by a foil tool electrode was proposed for slicing SiC. Comparative experiments of foil EDM of SiC between in deionized water and in EDM oil were conducted. The tool electrode wear ratio, area cutting speed, kerf width, and surface integrity were experimentally investigated, and the reasons for the differences were discussed. It was clarified that foil EDM in deionized water can attain a higher cutting speed than that in EDM oil under the same machining conditions. However, the surface roughness and tool wear ratio were larger than in EDM oil. Short pulse duration was found to be more suitable for EDM of single crystal SiC in both dielectric liquids.

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Section: Introductionmentioning

confidence: 99%

Comparison on foil EDM characteristics of single crystal SiC between in deionized water and in EDM oil

Zhao

Kunieda

Abe

2016

Int J Adv Manuf Technol

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“…EDM is the best choice for machining SiC ceramic because there is no contact between the tool electrode and workpiece during the process. However, conventional EDM such as die-sinking electrical discharge machining, wire electrical discharge machining (WEDM) and electrical discharge grinding (EDG) shows low efficiency when machining a large surface area on SiC ceramic [13][14][15]. Recently, EDM milling has been developed to improve the machining efficiency.…”

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confidence: 99%

Machining Performance Optimization in End ED Milling and Mechanical Grinding Compound Process

Zhang

et al. 2011

Materials and Manufacturing Processes

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Silicon carbide (SiC) ceramic has been widely used in modern industry for its excellent physical and mechanical properties. However, SiC ceramic is difficult to machine owing to its high hardness and brittleness. This article presents a novel compound process that integrates end electric discharge (ED) milling and mechanical grinding to machine SiC ceramic. The process is able to effectively machine a large surface area on SiC ceramic with a good surface quality. The effect of tool polarity on the machining characteristics such as the material removal rate (MRR), tool wear ratio (TWR), and surface roughness (SR) has been explored. The effects of pulse on-time, pulse off-time, discharge current and open voltage on MRR, TWR, and SR have been investigated with Taguchi experimental design. The experimental data are statistically evaluated by analysis of variance and stepwise regression. The significant machining parameters, the optimal combination levels of machining parameters, and the mathematical models associated with the machining characteristics are obtained. The confirmation experiment results confirm the validity of the used Taguchi method for enhancing the machining performance and optimizing the machining parameters.

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“…EDM of SiC single crystal has been performed by Kato et al [7] . Klocke and Zunke [21] investigated the material removal mechanisms in polishing of SiC and they concluded that the MRR and dominating material removal mechanism depends strongly on material properties and machining parameters.…”

Section: Introductionmentioning

confidence: 99%

“…Thus, there is no physical contact between the electrode and workpiece and hence material hardness is not an issue. In the past few years, researchers have demonstrated successful machining of ceramics such as WC [2][3][4], SiC [5][6][7], SiN [8], Si 3 N 4 [9], ZrO 2 [10] using EDM process. Thus, it follows that EDM is suitable for machining ceramics.…”

Section: Introductionmentioning

confidence: 99%

Experimental investigation into the micro-EDM characteristics of conductive SiC

Saxena

Srivastava

Agarwal

2016

Ceramics International

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Characterization of Electric Discharge Machining for Silicon Carbide Single Crystal

Cited by 25 publications

References 4 publications

Comparison on foil EDM characteristics of single crystal SiC between in deionized water and in EDM oil

Comparison on foil EDM characteristics of single crystal SiC between in deionized water and in EDM oil

Machining Performance Optimization in End ED Milling and Mechanical Grinding Compound Process

Experimental investigation into the micro-EDM characteristics of conductive SiC

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