Characterization of Films with Thickness Less than 10 nm by Sensitivity-Enhanced Atomic Force Acoustic Microscopy

Muraoka, Mikio; Komatsu, Shinji

doi:10.1007/s11671-010-9778-8

Cited by 5 publications

(5 citation statements)

References 17 publications

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“…The purpose of this study is to determine surface elastic forces on at surface and particulate region of DLC lms. The expression for stiffness (K*) of the coupled oscillator system can be written as; 25,26,35,36,51…”

Section: Surface Elasticity Distribution Analysismentioning

confidence: 99%

“…The contact resonance frequency of Si with known elastic constants and Poisson ratio was measured prior to commencing the measurements on the DLC specimens for contact resonance frequency and relative stiffness values. Mathematical expression for the contact resonance frequency the coupled oscillator system is given by eqn (4), 25,26,35,36,51…”

Section: Surface Elasticity Distribution Analysismentioning

confidence: 99%

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Nano scale investigation of particulate contribution to diamond like carbon film by pulsed laser deposition

et al. 2016

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Section: Surface Elasticity Distribution Analysismentioning

confidence: 99%

Section: Surface Elasticity Distribution Analysismentioning

confidence: 99%

Nano scale investigation of particulate contribution to diamond like carbon film by pulsed laser deposition

et al. 2016

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“…Hurley et al used the CR-FM method to study the adhesion at an interface of a 20 nm thin film of gold and silicon substrate [38]. Muraoka applied cantilevers modified with point weights to characterize 10 nm thin diamond-like-carbon layers by use of the AFAM method [39]. The AFAM method was also used to determine the indentation modulus of silicon oxide films with thicknesses ranging from 8 nm to 28 nm [40].…”

Section: Introductionmentioning

confidence: 99%

“…The AFAM method was also used to determine the indentation modulus of silicon oxide films with thicknesses ranging from 8 nm to 28 nm [40]. In the studies presented in [39,40] the substrate influence was considered. The results presented in this paper were obtained by combining the ability of the AFAM method to characterize very thin film [40] with that to determine the indentation modulus of low and ultra-low k materials as reported in [41,42,43].…”

Section: Introductionmentioning

confidence: 99%

Mechanical characterization of porous nano-thin films by use of atomic force acoustic microscopy

et al. 2016

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The indentation modulus of thin films of porous organosilicate glass with a nominal porosity content of 30% and thicknesses of 350nm, 200nm, and 46nm is determined with help of atomic force acoustic microscopy (AFAM). This scanning probe microscopy based technique provides the highest possible depth resolution. The values of the indentation modulus obtained for the 350nm and 200nm thin films were respectively 6.3GPa±0.2GPa and 7.2GPa±0.2GPa and free of the substrate influence. The sample with the thickness of 46nm was tested in four independent measurement sets. Cantilevers with two different tip radii of about 150nm and less than 50nm were applied in different force ranges to obtain a result for the indentation modulus that was free of the substrate influence. A detailed data analysis yielded value of 8.3GPa±0.4GPa for the thinnest film. The values of the indentation modulus obtained for the thin films of porous organosilicate glasses increased with the decreasing film thickness. The stiffening observed for the porous films could be explained by evolution of the pore topology as a function of the film thickness. To ensure that our results were free of the substrate influence, we analyzed the ratio of the sample deformation as well as the tip radius to the film thickness. The results obtained for the substrate parameter were compared for all the measurement series and showed, which ones could be declared as free of the substrate influence.

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“…AFAM combines ultrasonics with atomic force microscopy (AFM) [11][12][13][14]. It allows one to measure the local contact stiffness k * and with appropriate contact mechanics the local elasticity of samples on nanometer scales [14][15][16][17][18]. Longitudinal waves supplied by a waveform generator are injected into the sample making its surface vibrate and excite the cantilever beam to bending modes.…”

Section: Introductionmentioning

confidence: 99%

Local elasticity and mobility of twin boundaries in martensitic films studied by atomic force acoustic microscopy

Luo¹,

Büchsenschütz-Göbeler²,

Arnold³

et al. 2014

New J. Phys.

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Nanoscale elastic properties of twinned martensite NiMnGa films were characterized by means of atomic force acoustic microscopy using cantilever contact-resonance spectra to measure the local contact stiffness k * and the local damping Q −1 , which contains information on the crystallographic anisotropy of martensitic twin variants and the dissipative motion of twin boundaries (TBs). Images of k * and indentation modulus maps were obtained. Similar to topography images measured by conventional atomic force microscopy in contact mode, they show the nature of the twin structure and thus a regular variation in local elastic modulus. A correlation between k * and Q −1 was observed and mirrors the motion of the TB accompanied by a viscoelastic procedure. The k * -image and the topography image measured are opposite in contrast, which likely arises from mobile and immobile TBs depending on the geometry of twinning. Multi-resonance spectra were measured, which can be related to martensitic multivariants and are explainable as different types of nanotwins. A critical stress, defined as the starting point of softening due to TB movement was determined to be about 0.5 GPa for a thick film (1 µm) and 0.75 GPa for a thin film (0.15 µm), respectively. The values are much larger than that measured for bulk materials, but reasonable due to a large internal stress in the films.

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Characterization of Films with Thickness Less than 10 nm by Sensitivity-Enhanced Atomic Force Acoustic Microscopy

Cited by 5 publications

References 17 publications

Nano scale investigation of particulate contribution to diamond like carbon film by pulsed laser deposition

Nano scale investigation of particulate contribution to diamond like carbon film by pulsed laser deposition

Mechanical characterization of porous nano-thin films by use of atomic force acoustic microscopy

Local elasticity and mobility of twin boundaries in martensitic films studied by atomic force acoustic microscopy

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