Characterization of hard carbon films by electron energy loss spectrometry

Weißmantel, C.; Bewilogua, K.; Schürer, Christian; Breuer, K.; Zscheile, H.

doi:10.1016/0040-6090(79)90451-6

Cited by 52 publications

(5 citation statements)

References 2 publications

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“…In this respect, their deposition process was somewhat different from the one that Eisenberg and Chabot had used. Weissmental and his co-workers were the very first group of scientists who performed extensive electron microscopy and electronenergy loss spectroscopy work on DLC films to elucidate their structural and chemical nature [19]. Some of the earlier researchers had thought that these films were perhaps made of crystalline diamond, but the microscopic work by Weissmental et al proved otherwise; these films were made of amorphous carbon.…”

Section: Inception and Early Studiesmentioning

confidence: 99%

“…Solid carbon materials (such as graphite, glassy carbon or carbon-carbon composites) can also be used as carbon sources in the deposition of DLC films. These carbon sources are mostly used in cathodic arc-PVD, laser ablation (or pulse laser deposition, PLD), ion-beam assisted deposition and magnetron sputtering processes [19,[46][47][48][49]. The DLC films produced by conventional sputter deposition may contain large amounts of sp 2 -bonded carbon atoms, and hence they tend to be much softer than those DLCs deposited by arc-PVD and PLD methods.…”

Section: Hydrogen Moleculementioning

confidence: 99%

See 1 more Smart Citation

Tribology of diamond-like carbon films: recent progress and future prospects

Erdemir¹,

Donnet²

2006

J. Phys. D: Appl. Phys.

1,087

579

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During the past two decades, diamond-like carbon (DLC) films have attracted an overwhelming interest from both industry and the research community. These films offer a wide range of exceptional physical, mechanical, biomedical and tribological properties that make them scientifically very fascinating and commercially essential for numerous industrial applications. Mechanically, certain DLC films are extremely hard (as hard as 90 GPa) and resilient, while tribologically they provide some of the lowest known friction and wear coefficients. Their optical and electrical properties are also extraordinary and can be tailored to meet the specific requirements of a given application. Because of their excellent chemical inertness, these films are resistant to corrosive and/or oxidative attacks in acidic and saline media. The combination of such a wide range of outstanding properties in one material is rather uncommon, so DLC can be very useful in meeting the multifunctional application needs of advanced mechanical systems. In fact, these films are now used in numerous industrial applications, including razor blades, magnetic hard discs, critical engine parts, mechanical face seals, scratch-resistant glasses, invasive and implantable medical devices and microelectromechanical systems. DLC films are primarily made of carbon atoms that are extracted or derived from carbon-containing sources, such as solid carbon targets and liquid and gaseous forms of hydrocarbons and fullerenes. Depending on the type of carbon source being used during the film deposition, the type of bonds (i.e. sp 1 , sp 2 , sp 3) that hold carbon atoms together in DLC may vary a great deal and can affect their mechanical, electrical, optical and tribological properties. Recent systematic studies of DLC films have confirmed that the presence or absence of certain elemental species, such as hydrogen, nitrogen, sulfur, silicon, tungsten, titanium and fluorine, in their microstructure can also play significant roles in their properties. The main goal of this review paper is to highlight the most recent developments in the synthesis, characterization and application of DLC films. We will also discuss the progress made in understanding the fundamental mechanisms that control their very unique friction and wear behaviours. Novel design concepts and the principles of superlubricity in DLC films are also presented.

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Section: Inception and Early Studiesmentioning

confidence: 99%

Section: Hydrogen Moleculementioning

confidence: 99%

Tribology of diamond-like carbon films: recent progress and future prospects

Erdemir¹,

Donnet²

2006

J. Phys. D: Appl. Phys.

1,087

579

View full text Add to dashboard Cite

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“…Along with the development of the CVD diamond deposition technique, DLC has also been relatively developed for low temperature coating which offers low friction and wear properties relevant to sliding, rolling or rotating parts in MEMS/ NEMS devices. The first report of DLC films was by Aisenberg and Chabot [16] in 1971, followed by a series of reports by Holland [17] and Weissmantel [18,19]. Details of wok on DLC films will not be discussed in this paper.…”

Section: History Of Chemical Vapor Deposition (Cvd) Of Diamondmentioning

confidence: 96%

Review on advances in microcrystalline, nanocrystalline and ultrananocrystalline diamond films-based micro/nano-electromechanical systems technologies

Auciello

Aslam

2021

J Mater Sci

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A comprehensive review is presented on the advances achieved in past years on fundamental and applied materials science of diamond films and engineering to integrate them into new generations of microelectromechanical system (MEMS) and nanoelectromechanical systems (NEMS). Specifically, the review focuses on describing the fundamental science performed to develop thin film synthesis processes and the characterization of chemical, mechanical, tribological and electronic properties of microcrystalline diamond, nanocrystalline diamond and ultrananocrystalline diamond films technologies, and the research and development focused on the integration of the diamond films with other film-based materials. The review includes both theoretical and experimental work focused on optimizing the films synthesis and the resulting properties to achieve the best possible MEMS/NEMS devices performance to produce new generation of MEMS/NEMS external environmental sensors and energy generation devices, human body implantable biosensors and energy generation devices, electron field emission devices and many more MEMS/NEMS devices, to produce transformational positive impact on the way and quality of life of people worldwide.

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“…Diamond-like carbon films have been studied for more than two decades. The first report of DLC films was by Aisenberg and Chabot [1], followed by a series of reports by Holland [2,3] and Weissmantel [4,5]. A more recent paper that gives a comprehensive review of the subject is by Angus, Koidl, and Domitz [6].…”

Section: Introduction-wen Hsumentioning

confidence: 99%