Characterization of parylene coated combined scanning probe tips for in-situ electrochemical and topographical imaging

Heintz, E.L.H.; Kranz, Christine; Mizaikoff, Boris; Noh, Hyowoong; Hesketh, Peter J.; Lugstein, Alois; Bertagnolli, E.

doi:10.1109/nano.2001.966446

Cited by 4 publications

(2 citation statements)

References 12 publications

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“…Integrated AFM − SECM Probes. For the fabrication of combined AFM−SECM probes, commercially available silicon nitride AFM cantilevers (Veeco Instruments, Santa Barbara, CA; length 200 μm, nominal spring constant 0.06 N m -1 , pyramidal tip base 4 × 4 μm 2 , and tip height 2.86 μm) were coated with a gold layer (100 nm) and then insulated with a xylylene polymer (Parylene C) by vapor deposition polymerization . 3D focused ion beam (FIB) milling was used to expose the electroactive area and to precisely correlate the length of the AFM tip with the electrode dimensions.…”

Section: Methodsmentioning

confidence: 99%

Numerical Simulation of Scanning Electrochemical Microscopy Experiments with Frame-Shaped Integrated Atomic Force Microscopy−SECM Probes Using the Boundary Element Method

et al. 2004

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Integrated submicroelectrodes for combined AFM-SECM measurements are characterized with numerical simulations using the boundary element method. SECM approach curves and SECM images are calculated and analyzed for a model substrate containing pronounced topographical and electrochemical features. The theoretically calculated image has been compared to the experimental data and shows excellent quantitative agreement. Hence, the applicability of integrated AFM-SECM electrodes for combined electrochemical and topographical imaging and a profound theoretical description including quantification of the obtained results are demonstrated.

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Section: Methodsmentioning

confidence: 99%

Numerical Simulation of Scanning Electrochemical Microscopy Experiments with Frame-Shaped Integrated Atomic Force Microscopy−SECM Probes Using the Boundary Element Method

et al. 2004

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“…Microfabricated bifunctional AFM−SECM probes described previously are mostly insulated with silicon nitride and/or silicon oxide deposited by PECVD. Alternatively, Parylene C has been applied to insulate combined AFM−SECM probes with recessed electrodes. , Within the present study, a novel insulation technique for combined AFM−SECM probes based on plasma-deposited fluorocarbon films using pentafluoroethane (PFE, CF 3 CHF 2 ) as a precursor is reported.…”

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confidence: 99%

Plasma-Deposited Fluorocarbon Films: Insulation Material for Microelectrodes and Combined Atomic Force Microscopy−Scanning Electrochemical Microscopy Probes

et al. 2008

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Pinhole-free insulation of micro- and nanoelectrodes is the key to successful microelectrochemical experiments performed in vivo or in combination with scanning probe experiments. A novel insulation technique based on fluorocarbon insulation layers deposited from pentafluoroethane (PFE, CF3CHF2) plasmas is presented as a promising electrical insulation approach for microelectrodes and combined atomic force microscopy-scanning electrochemical microscopy (AFM-SECM) probes. The deposition allows reproducible and uniform coating, which is essential for many analytical applications of micro- and nanoelectrodes such as, e.g., in vivo experiments and SECM experiments. Disk-shaped microelectrodes and frame-shaped AFM tip-integrated electrodes have been fabricated by postinsulation focused ion beam (FIB) milling. The thin insulation layer for combined AFM-SECM probes renders this fabrication technique particularly useful for submicro insulation providing radius ratios of the outer insulation versus the disk electrode (RG values) suitable for SECM experiments. Characterization of PFE-insulated AFM-SECM probes will be presented along with combined AFM-SECM approach curves and imaging.

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Mapping of enzyme activity by detection of enzymatic products during AFM imaging with integrated SECM–AFM probes

et al. 2004

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Characterization of parylene coated combined scanning probe tips for in-situ electrochemical and topographical imaging

Cited by 4 publications

References 12 publications

Numerical Simulation of Scanning Electrochemical Microscopy Experiments with Frame-Shaped Integrated Atomic Force Microscopy−SECM Probes Using the Boundary Element Method

Numerical Simulation of Scanning Electrochemical Microscopy Experiments with Frame-Shaped Integrated Atomic Force Microscopy−SECM Probes Using the Boundary Element Method

Plasma-Deposited Fluorocarbon Films: Insulation Material for Microelectrodes and Combined Atomic Force Microscopy−Scanning Electrochemical Microscopy Probes

Mapping of enzyme activity by detection of enzymatic products during AFM imaging with integrated SECM–AFM probes

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