Charge detection with nanomechanical resonators

Blick, Robert H.; Erbe, Artur; Krömmer, H.; Kraus, A.; Kotthaus, J. P.

doi:10.1016/s1386-9477(99)00250-7

Cited by 23 publications

(19 citation statements)

References 14 publications

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“…The torsional element on the resonator also alleviates clamping or anchor loss to enhance the Figure 5. NEMS based charge sensor using a translational resonators (a) suspended Si [75] (b) suspended graphene [76] The magnetomotive technique on a NEMS resonant charge sensor is advantageous for detecting charge sensitivity. Nevertheless, it is particularly limited by the requirement of comparatively strong magnetic fields (8 Tesla in [66] CNT between source and drain electrodes (b) measurement setup [77] Frequency stability is a key concern for the performance of nano-resonators and their applications.…”

Section: Resonant Electrometermentioning

confidence: 99%

“…This very high resolution makes the device competitive with the cryogenic SET electrometers, but with important added advantages of higher temperature operation and the ability to respond over a greatly increased bandwidth. Due to a high fundamental resonance frequency of 2.61 MHz, the mechanical Johnson noise effect is insignificant in this case.Blick et al[75] have introduced another NEMS based charge sensor, which significantly enhances the speed of charge detection by using a clamped beam as a translational (flexural) resonator (figure 5 (a)). The device has been fabricated on an SOI substrate by a combined dry-and wet-etched process.…”

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confidence: 99%

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Sensing of single electrons using micro and nano technologies: a review

et al. 2017

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During the last three decades, the remarkable dynamic features of microelectromechanical systems (MEMS) and nanoelectromechanical systems (NEMS), and advances in solid-state electronics hold much potential for the fabrication of extremely sensitive charge sensors. These sensors have a broad range of applications, such as those involving the measurement of ionization radiation, detection of bio-analyte and aerosol particles, mass spectrometry, scanning tunneling microscopy, and quantum computation. Designing charge sensors (also known as charge electrometers) for electrometry is deemed significant because of the sensitivity and resolution issues in the range of micro- and nano-scales. This article reviews the development of state-of-the-art micro- and nano-charge sensors, and discusses their technological challenges for practical implementation.

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Section: Resonant Electrometermentioning

confidence: 99%

mentioning

confidence: 99%

Sensing of single electrons using micro and nano technologies: a review

et al. 2017

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“…This method makes use of the Lorentz force [67]. If a current flows through a wire that is exposed to a perpendicular magnetic field, a force acts on the current and the wire moves perpendicular to the magnetic field.…”

Section: Magnetic Detectionmentioning

confidence: 99%

Directed Self-Assembly

2012

Nanofabrication Handbook

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I would like to thank all the people who supported this work with their knowledge and time. Steve McCartney for teaching me electron microscopy, for his help in setting up the electron beam lithography tool and for giving me access to the microscope around the clock. Fred A. Mahone from the physics electronic shop for his quick response to my inquiries and for all the answers to my questions regarding the measurement equipment. Melvin Shaver, Scott Allen and John Miller from the physics machine shop for their help and input in building the setup. Dan Huff from the packaging lab for giving me access to the wirebonder. Dr. Hendricks and David Gray for the access to the clean room. Christopher Maxey for running the FEM simulation of the paddle resonators for me. Ben

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“…The trend has leaned towards small, stiff and low-mass micro-electro-mechanical systems (MEMS), and further towards nano-electro-mechanical systems (NEMS). There have been examples of reports of using nano-mechanical resonators for myriad applications including mass sensing, charge detection, biosensing and radio frequency (RF) communications [2,5,[8][9][10][11][12][13]. While there has been impressive progress in MEMS and NEMS resonators, these resonators are mostly chip-based and in-plane and are fabricated using silicon micro and nano-fabrication processes.…”

Section: Introductionmentioning

confidence: 99%

A Thermoacoustic Model for High Aspect Ratio Nanostructures

2016

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Abstract:In this paper, we have developed a new thermoacoustic model for predicting the resonance frequency and quality factors of one-dimensional (1D) nanoresonators. Considering a nanoresonator as a fix-free Bernoulli-Euler cantilever, an analytical model has been developed to show the influence of material and geometrical properties of 1D nanoresonators on their mechanical response without any damping. Diameter and elastic modulus have a direct relationship and length has an inverse relationship on the strain energy and stress at the clamp end of the nanoresonator. A thermoacoustic multiphysics COMSOL model has been elaborated to simulate the frequency response of vibrating 1D nanoresonators in air. The results are an excellent match with experimental data from independently published literature reports, and the results of this model are consistent with the analytical model. Considering the air and thermal damping in the thermoacoustic model, the quality factor of a nanowire has been estimated and the results show that zinc oxide (ZnO) and silver-gallium (Ag 2 Ga) nanoresonators are potential candidates as nanoresonators, nanoactuators, and for scanning probe microscopy applications.

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Charge detection with nanomechanical resonators

Cited by 23 publications

References 14 publications

Sensing of single electrons using micro and nano technologies: a review

Sensing of single electrons using micro and nano technologies: a review

Directed Self-Assembly

A Thermoacoustic Model for High Aspect Ratio Nanostructures

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