2013
DOI: 10.1016/j.apsusc.2013.08.073
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Chemical and structural properties of polymorphous silicon thin films grown from dichlorosilane

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Cited by 6 publications
(1 citation statement)
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“…The surface of the PM film was smooth with sporadic clusters which were easily detectable by their enhanced contrast since they slightly stuck out of the plane. The smooth part that dominated the surface was in accordance with the amorphous nature of this sample [45,46], as revealed by Raman measurements. The clusters represented aggregated crystallites, which formed nc-Si:H NPs.…”
Section: Amorphous Phasesupporting
confidence: 80%
“…The surface of the PM film was smooth with sporadic clusters which were easily detectable by their enhanced contrast since they slightly stuck out of the plane. The smooth part that dominated the surface was in accordance with the amorphous nature of this sample [45,46], as revealed by Raman measurements. The clusters represented aggregated crystallites, which formed nc-Si:H NPs.…”
Section: Amorphous Phasesupporting
confidence: 80%