This chapter is extended to various electronical and optical modifications of amorphous silica (a-SiO 2) layers as they are applied in microelectronics, optoelectronics, as well as in the forthcoming photonics. Scanning electron microscopy (SEM), energy dispersive X-ray analysis (EDX), Fourier transform infrared spectroscopy (FTIR) and cathodoluminescence (CL) have been used to investigate thermally grown pure amorphous silicon dioxide and ion-implanted layers with thickness d ox =100-500 nm. The main luminescent centers in silicon dioxide layers are the red luminescence (650 nm; 1.85 eV) of the non-bridging oxygen hole center (NBOHC; ≡Si-O•), a blue (460 nm; 2.7 eV) and a ultra violet luminescence (290 nm; 4.3 eV) of the oxygen deficient centers (ODC's; ≡Si•••Si≡), and a yellow luminescence (570 nm; 2.2 eV) appears especially in hydrogen treated silica indicating water molecules, and on the other hand, in silicon excess samples indicating higher silicon aggregates. A quite different CL dose behavior of the red luminescence is observed in dry and hydrogen-treated samples due to dissociation and re-association of mobile hydrogen and oxygen to radicals of the silica network. Additionally implanted hydrogen diminishes the red luminescence in wet oxide but maintains the blue and the UV bands. Thus hydrogen passivates the NBOHC and keeps the ODC's in active emission states. A model of luminescence center transformation is proposed based on radiolytic dissociation and re-association of mobile oxygen and hydrogen at the centers as well as formation of interstitial H 2 , O 2 , and H 2 O molecules. Non-stoichiometric SiO x layers produced by direct ion implantation or reactive sputtering are used to investigate whether the different luminescent centers are related to oxygen or to silicon. Oxygen implantation as well as direct silicon implantation led to an oxygen surplus as well as an oxygen deficit, respectively. The related luminescence damages provide direct evidence to the nature of the defects. Oxygen-deficient thin silica layers SiO x with different stoichiometric degree 1≤x≤2, were prepared by thermal evaporation of silicon monoxide in vacuum and in ambient oxygen atmosphere of varying pressure onto crystalline silicon substrates. The chemical composition has been calibrated and determined by FTIR spectroscopy. The CL spectra of the oxygen-deficient layers shows the development of typical silica luminescence bands at the composition threshold x≤1.5 onwards to x=2. The