Chemical mechanical polishing of thin film diamond

Thomas, Evan L. H.; Nelson, Geoffrey W.; Mandal, Soumen; Foord, John S.; Williams, Oliver A.

doi:10.1016/j.carbon.2013.11.023

Cited by 138 publications

(90 citation statements)

References 26 publications

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“…PCD coating was very hard and polishing of the as-deposited diamond surface was very challenging. Chemo-mechanical polishing is one of the popular polishing techniques of thin diamond coatings [35,36]. Chemical wet etching was done for the W11 diamond coating to remove the base substrate for getting the free standing diamond coating.…”

Section: Processing Of Pcd Coatingsmentioning

confidence: 99%

Severe wear behaviour of alumina balls sliding against diamond ceramic coatings

et al. 2016

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At present alumina is the most widely used bio-ceramic material for implants. However, diamond surface offers very good solid lubricant for different machinery, equipment including biomedical implants (hip implants, knee implants, etc.), since the coefficient of friction (COF) of diamond is lower than alumina. In this tribological study, alumina ball was chosen as the counter body material to show better performance of the polycrystalline diamond (PCD) coatings in biomedical load-bearing applications. Wear and friction data were recorded for microwave plasma chemical vapour deposition (MWCVD) grown PCD coatings of four different types, out of which two samples were as-deposited coatings, one was chemo-mechanically polished and the other diamond sample was made free standing by wet-chemical etching of the silicon wafer. The coefficient of friction of the MWCVD grown PCD against Al 2 O 3 ball under dry ambient condition was found in the range of 0.29-0.7, but in the presence of simulated body fluid, the COF reduces significantly, in the range of 0.03-0.36. The samples were then characterized by Raman spectroscopy for their quality, by coherence scanning profilometer for surface roughness and by electron microscopy for their microstructural properties. Alumina balls worn out (14.2 × 10 −1 mm 3 ) very rapidly with zero wear for diamond ceramic coatings. Since the generation of wear particle is the main problem for load-bearing prosthetic joints, it was concluded that the PCD material can potentially replace existing alumina bio-ceramic for their better tribological properties.

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Section: Processing Of Pcd Coatingsmentioning

confidence: 99%

Severe wear behaviour of alumina balls sliding against diamond ceramic coatings

et al. 2016

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“…The more surface undercut the more dissipation is possible in the vibrating surroundings of the resonators' clamps, the higher the losses. Possible solutions to increase this quality factor would be to use the so-called free-free beam design 39 , to reduce the surface losses by smoothing the surface with mechanical or chemical polishing before nanofabrication 40 and to remove the undercut by means of a focused ion beam technique. Nevertheless, the observed quality factors are comparable with state-of-the art resonators 22,41,42 .…”

Section: Measurementsmentioning

confidence: 99%

Superconducting nano-mechanical diamond resonators

Bautze

Mandal

Williams

et al. 2014

Carbon

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In this work we present the fabrication and characterization of superconducting nano-mechanical resonators made from nanocrystalline boron doped diamond (BDD). The oscillators can be driven and read out in their superconducting state and show quality factors as high as 40,000 at a resonance frequency of around 10 MHz. Mechanical damping is studied for magnetic fields up to 3 T where the resonators still show superconducting properties. Due to their simple fabrication procedure, the devices can easily be coupled to other superconducting circuits and their performance is comparable with state-of-the-art technology.

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“…Nanomaterials are highly attractive to current industry and emerging technology [1][2][3][4][5][6][7][8][9][10][11][12][13]. Among the nanomaterials available in the market, ceramic nanopowders, especially silica, ceria, and titania, have been employed extensively as important components in nanomaterials-enabled products [7][8][9][14][15][16][17].…”

Section: Introductionmentioning

confidence: 99%