Chemical vapor deposition of carbon films: in-situ plasma diagnostics

Obraztsov, A. N.; Zolotukhin, A. A.; Ustinov, A. O.; Волков, А. П.; Svirko, Yu. P.

doi:10.1016/s0008-6223(02)00402-5

Cited by 46 publications

(23 citation statements)

References 4 publications

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“…This opens new opportunities in development of cathodoluminescent light sources with record high efficiency and reliability. Very recently we have demonstrated that irradiation of the NG films by nanosecond laser pulse results in generation of a strong DC current in the film due to the optical rectification and photovoltaic effects [2]. The temporal profile of this light-induced DC current reproduces that of the light pulse in a wide spectral range.…”

Section: Introductionmentioning

confidence: 82%

Laser‐assisted electron emission from CVD nano‐graphite films

Lyashenko

Obraztsova

Obraztsov

et al. 2006

Physica Status Solidi (b)

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We demonstrate that irradiation with nano-second light pulses results in significant enhancement of the electron emission from nano-graphite films. The observed emission current density is as high as 10 A/cm 2 at applied field of 2 V/µm. The duration of the emission pulse depends on the applied DC voltage and laser intensity. However, in our experimental conditions, the temporal profile of the electron pulse nearly reproduces that of the incident laser pulse.

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Section: Introductionmentioning

confidence: 82%

Laser‐assisted electron emission from CVD nano‐graphite films

Lyashenko

Obraztsova

Obraztsov

et al. 2006

Physica Status Solidi (b)

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“…Under irradiation of NCF with intense femtosecond pulses, the energy of photons is transfered to electrons creating an ensemble of hot electrons. In order to estimate the electron temperature we need to determine the free electron density, which can be considerably higher than its equilibrium value of about 10 19 cm −3 [13].…”

Section: Discussionmentioning

confidence: 99%

“…The NCF was deposited on the n-doped silicon substrate by using chemical vapour deposition (CVD) of the hydrogen-methane gas mixture [10]. One can observe from Fig.…”

Section: Methodsmentioning

confidence: 99%

“…However, development of such electron sources requires cathode materials, which are capable to provide a high density electron current and possess a high ray stability [7][8][9]. One of the most promising materials here are nanocarbon films (NCF) consisting of disordered graphene sheets [10] that demonstrated high efficiency of the field electron emission and durability with response to laser treatment. Owing to their unique structure and relative simplicity of the fabrication process, NCF are promising for various applications in electronic devices.…”

Section: Introductionmentioning

confidence: 99%

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The laser assisted field electron emission from carbon nanostructure

Lyashenko

Svirko

Petrov

et al. 2017

J. Eur. Opt. Soc.-Rapid Publ.

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We present experimental and theoretical study of the femtosecond light-assisted field electron emission from nanocarbon films. We demonstrate that irradiation with intense femtosecond laser pulse allows one to achieve electron emission density of up to 13 nC/cm 2 at a moderate applied static electric filed. The developed model well describes obtained experimental results and allows us to visualize physical mechanisms including heating of electron gas, multiphoton photoionization, and the space charge formation, which are responsible for the observed phenomena.

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“…Non-equilibrium (low-temperature) discharges at low pressures, such as MW [16], MW electron-cyclotron resonance (ECR) [17] and DC glow discharges [6,7,18,19], capacitive [20,21] or inductive [22][23][24] radio-frequency (RF) glow discharges, have previously been applied for the deposition of MWNTs. Due to the plentiful supply of carbon caused by the presence of reactive radicals and unsaturated hydrocarbons in plasma, ion damage, and probably also unsuitable catalyst preparation, many of the PECVD processes were not successful in the synthesis of SWNTs.…”

Section: Chemical Vapor Deposition Of Carbon Nanotubesmentioning

confidence: 99%

Synthesis of carbon nanotubes by plasma-enhanced chemical vapor deposition in an atmospheric-pressure microwave torch

Zajı́čková

Jašek

Eliáš

et al. 2010

Pure and Applied Chemistry

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Abstract:There are many different techniques for the synthesis of carbon nanotubes (CNTs), and plasma technologies experience a significant competitor in thermal chemical vapor deposition (CVD) processes. A particular process is, therefore, selected according to the specific requirements of an application, which clearly differ for the development of composites as compared to nanoelectronics, field emission, displays, sensors, and the like. This paper discusses the method for the synthesis of CNTs using an atmospheric-pressure microwave (MW) torch. It was successfully applied in the fast deposition of multiwalled nanotubes (MWNTs) on a substrate without the necessity of any vacuum or heating equipment. Dense straight-standing nanotubes were prepared on Si substrates with and also without barrier SiO x layer. Therefore, it was possible to produce CNTs directly on conductive Si and to use them as an electron-emitting electrode of the gas pressure sensor. The CNTs grown in MW torch were also used to create a gas sensor based on the changes of electrical resistance measured between two planar electrodes connected by the CNTs.

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Chemical vapor deposition of carbon films: in-situ plasma diagnostics

Cited by 46 publications

References 4 publications

Laser‐assisted electron emission from CVD nano‐graphite films

Laser‐assisted electron emission from CVD nano‐graphite films

The laser assisted field electron emission from carbon nanostructure

Synthesis of carbon nanotubes by plasma-enhanced chemical vapor deposition in an atmospheric-pressure microwave torch

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