2000
DOI: 10.1016/s0040-6090(00)00763-x
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Chemical vapor deposition of novel carbon materials

Abstract: Nanocrystalline diamond thin ®lms have been prepared using hot ®lament CVD technique with a mixture of CH 4 /H 2 /Ar as the reactant gas. We demonstrated that the ratio of H 2 to Ar in the reactant gas plays an important role in control of the grain size of diamonds and the growth of the nanocrystalline diamonds. In addition, we have investigated the growth of carbon nanotubes from catalytic CVD using a hydrocarbon as the reactant gas. Furthermore, focused ion beam technique has been developed to control the g… Show more

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Cited by 35 publications
(7 citation statements)
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“…Scientists have tried several interesting synthetic routes to obtain high quality carbon. These include carbonization of organic/polymeric precursors, [22][23][24] chemical vapour deposition, [25][26][27][28][29][30][31] excimer laser ablation of graphitic targets, [32][33][34] sputtering/plasma based synthesis, 35,36 arc discharge synthesis, 37,38 chemical methods, etc. 39,40 More recently researchers have started utilizing organic waste materials for the synthesis of carbon for specic absorbants or charge storage applications.…”
Section: Introductionmentioning
confidence: 99%
“…Scientists have tried several interesting synthetic routes to obtain high quality carbon. These include carbonization of organic/polymeric precursors, [22][23][24] chemical vapour deposition, [25][26][27][28][29][30][31] excimer laser ablation of graphitic targets, [32][33][34] sputtering/plasma based synthesis, 35,36 arc discharge synthesis, 37,38 chemical methods, etc. 39,40 More recently researchers have started utilizing organic waste materials for the synthesis of carbon for specic absorbants or charge storage applications.…”
Section: Introductionmentioning
confidence: 99%
“…There have been intensively investigated for supercapacitor electrode application such as activated carbons 3 , templated carbons 4 , carbon nanofibers 5 , carbon nanotubes 6 , carbide-derived carbons 7 and graphenes 8 9 10 . Several interesting synthetic routes have been found to obtain the high quality carbons, including carbonization of organic/polymeric precursors 11 12 13 , chemical vapor deposition 14 15 16 17 18 19 , excimer laser ablation of graphitic targets 20 21 22 , arc discharge syntheses 23 24 , sputtering/plasma based syntheses 25 26 , chemical methods, etc 27 28 . However, those methods have obvious shortages.…”
mentioning
confidence: 99%
“…These two peaks are normally accompanied by a significant grain refinement of diamond films down to nanometer scale. Thus, they are regarded as the typical indication of a nanocrystalline diamond 16,17 . In combination with the morphological features, it is determined that a nanocrystalline diamond film has been formed on the TiSiN and TiAlSiN interlayers, in combination with an increased content of a nondiamond carbon structure.…”
Section: Resultsmentioning
confidence: 99%