Circular and rectangular via holes formed in SiC via using ArF based UV excimer laser

Liu, Lu; Chang, C. Y.; Wu, Whei Mei; Pearton, S. J.; Ren, F.

doi:10.1016/j.apsusc.2010.09.093

Cited by 10 publications

(3 citation statements)

References 26 publications

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“…Ablation rate of via holes produced on SiC wafers by a 193 nm ArF excimer laser at 100 Hz was found to increase from 0.1 µm/pulse to 0.18 µm/pulse when the hole diameter was decreased from 70 µm to 10 µm [18]. The authors attributed the increased ablation rate with decreasing hole diameter to the reflected laser light from the side wall of the via hole which is focused on the bottom of the via hole leading to an enhancement of ablation rate [18]. A reduction in ablation rate of polyimide polymers was observed with increasing crater diameter in the fluence range from 2 to 33 J cm −2 at excimer laser wavelength of 248 nm [17].…”

Section: Introductionmentioning

confidence: 92%

Section: Introductionmentioning

confidence: 99%

“…Several studies have investigated the influence of spot size on ablation rate for various materials using different laser systems [15,[17][18][19][20]. Ablation rate of via holes produced on SiC wafers by a 193 nm ArF excimer laser at 100 Hz was found to increase from 0.1 µm/pulse to 0.18 µm/pulse when the hole diameter was decreased from 70 µm to 10 µm [18]. The authors attributed the increased ablation rate with decreasing hole diameter to the reflected laser light from the side wall of the via hole which is focused on the bottom of the via hole leading to an enhancement of ablation rate [18].…”

Section: Introductionmentioning

confidence: 99%

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Excimer laser ablation of aluminum: influence of spot size on ablation rate

2016

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The dependence of ablation rate of an Al alloy on laser beam spot size (10-150 µm) was investigated using an ArF excimer laser operating at a wavelength of 193 nm and pulse width less than 4 ns. Ablation was conducted in air at a fluence of 11 J cm −2 and at a repetition rate of 20 Hz. Surface morphology and depth of craters produced by a variable number of laser pulses were characterized using optical and scanning electron microscopy. Laser ablation inductively coupled plasma mass spectrometry (LA-ICP-MS) was used as an additional diagnostic technique to estimate the amount of material ablated from craters produced by a laser beam of different diameters. Laser beam spot size and number of laser pulses applied to the same spot were found to influence crater morphology, ablation rate, shape and amount of particles deposited at or around the crater rim. Ablation rate was found to be less dependent on spot size for craters greater than 85 µm. A four-fold increase in ablation rate was observed with decreasing crater size from 150 µm to 10 µm.

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Section: Introductionmentioning

confidence: 92%