CMOS Compatible Capacitive Pressure Sensor with Read-Out Electronics

Applied electrostatic parallelogram actuators for microwave switches using the standard CMOS process

“…The angle, θ, is 45 • . The deflection, dy, equals 4 µm when substituting dx = 2 µm and θ = 45 • into equation (2). This means that the maximum movement of the T-type connectors is 4 µm.…”

“…The accelerated developments in microelectromechanical systems (MEMS) over the recent decade have rapidly promoted the fields of sensors (accelerometers and pressure sensors), micromachines (actuators, motors and pumps), microstructures (mirrors, switches and grippers) and control components (high definition television displays and spatial light modulators). Some products have been successfully commercialized (for example, integrated accelerometers [1] and pressure sensors [2]) with others soon to appear on the market.…”

Medical implants based on microsystems

“…A telemetric sensor chip (figure 4(b)) and a ferrite coil (figure 4(a)) are integrated in the capsule. The sensor chip uses a surface micromachined capacitive pressure sensor [23,24] that consists of an array of single circular pressure sensitive elements and of reference elements switched in parallel. Such elements consist of vertical capacitors which are formed by a fixed electrode in the substrate and a movable membrane made of polycrystalline silicon above, as shown in figure 5.…”

Mikroelektromechanische Systeme in der Biomedizintechnik

“…1: Neuronales Interface[3] Ein Elektroden-Array von 8x8 Elementen mit entsprechenden Durchgängen für die Axone dient einerseits der elektrischen Stimulation von Nervenendigungen und andererseits der elektronischen Ankopplung an Nervenleitung um eine elektronische Weiterverarbeitung zuzulassen. Das neuronale Interface stellt die Voraussetzung für die Entwicklung einer nervenstromgesteuerten Prothese dar.Mikrosensor zur Druckmessung im KatheterDer Chip zur Messung des intravenösen Blutdruckes an der Spitze eines Kathetersystems wurde am Fraunhofer-Institut in Duisburg entwickelt[4]. Auf einem Silizium-Chip wurde eine Anordnung von 81 kapazitiven Drucksensoren in planerer CMOS-Technologie für die Druckmessung aufgebaut.…”