This article presents an overview of the ''Nanolith'' parallel electron-beam ͑e-beam͒ lithography approach. The e-beam writing head consists of an array of microguns independently driven by an active matrix complementary metal-oxide-semiconductor circuit. At the heart of each microgun is a field-emission microcathode comprised of an extraction gate and vertical carbon nanotube emitter, whose mutual alignment is critical in order to achieve highly focused electron beams. Thus, in this work, a single-mask, self-aligned technique is developed to pattern the extraction gate, insulator, and nanotubes in the microcathode. The microcathode examined here (150ϫ150 gates, 2 m gate diameter, with multiple nanotubes per gate͒ exhibited a peak current of 10.5 A at 48 V when operated with a duty cycle of 0.5%. The self-aligned process was extended to demonstrate the fabrication of single nanotube-based microcathodes with submicron gates.

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This paper presents the MIMOSA architecture and development platform to create Ambient Intelligence applications. MIMOSA achieves this objective by developing a personal mobile-device centric architecture and open technology platform where microsystem technology is the key enabling technology for their realization due to its low-cost, low power consumption, and small size. This paper focuses the demonstration activities carried out in the field of health care. MIMOSA project is a European level initiative involving 15 enterprises and research institutions and universities.

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