CMOS Vertical Hall Magnetic Sensors on Flexible Substrate

Heidari, Hadi; Bonizzoni, Edoardo; Gatti, U.; Maloberti, Franco; Dahiya, Ravinder

doi:10.1109/jsen.2016.2575802

Cited by 56 publications

(34 citation statements)

References 32 publications

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“…What will happen if we mount the rigid hall sensor onto flexible polymeric substrate? As have been studied [17], if a bulk hall sensor mounted onto a polyimide film, the total structure can sustain a moderate value of bending. In the meantime, the bending will also induce a nonnegligible change to the magnetic sensitivity due to the piezoHall effect.…”

Section: A Hall Effect Sensorsmentioning

confidence: 98%

Towards flexible magnetoelectronics for robotic applications

Heidari

Liu

Dahiya

2017

2017 2nd Asia-Pacific Conference on Intelligent Robot Systems (ACIRS)

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Abstract-This paper presents the technological advancements in the field of flexible magnetic sensors for robotics applications. Various magnetic devices (e.g. Hall, GMR, AMR and TMR) have been studied and their suitability for flexible application has been presented. Further, the system level integration of magnetic sensors in robotics is briefly discussed. With rapid development in flexible electronics, a robot with multi-functional conformable electronic skin will be possible in the foreseeable future. This will also open new avenues for a wide range of other applications including wearable electronics and interactive electronic-skin for robots and prosthesis.

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Section: A Hall Effect Sensorsmentioning

confidence: 98%

Towards flexible magnetoelectronics for robotic applications

Heidari

Liu

Dahiya

2017

2017 2nd Asia-Pacific Conference on Intelligent Robot Systems (ACIRS)

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“…However, this offset can be easily suppressed by the 4F-3C structure using the current spinning [9,10] and is not significant in most cases.…”

Section: Sensitivity Enhancement By Trench Implantationmentioning

confidence: 99%

“…Sensitivity is critical for a CMOS VHD because a magnetic input signal is usually small, and the DC offset and 1/f noise are not negligible at a low-frequency region [8]. One of the most popular methods to reduce the offset of a VHD is a four-folded and threecontact (4F-3C) structure, but its sensitivity is still limited [9,10]. This structure consists of four basic VHDs, and the sensitivity of each VHD contributes to the overall sensitivity.…”

Section: Introductionmentioning

confidence: 99%

Sensitivity Enhancement of a Vertical-Type CMOS Hall Device for a Magnetic Sensor

Jang

Chae

2018

J Electromagn Eng Sci

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This study presents a vertical-type CMOS Hall device with improved sensitivity to detect a 3D magnetic field in various types of sensors or communication devices. To improve sensitivity, trenches are implanted next to the current input terminal, so that the Hall current becomes maximum. The effect of the dimension and location of trenches on sensitivity is simulated in the COMSOL simulator. A verticaltype Hall device with a width of 16 μm and a height of 2 μm is optimized for maximum sensitivity. The simulation result shows that it has a 23% better result than a conventional vertical-type CMOS Hall device without a trench.

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“…This also allows testing of the whole circuit. For optimal covering of the components of sensor patch, and to enable the use of all sensing functionalities, a 150 µm-thick double polyimide layer based FPC was used [13]. The printed circuit board (PCB) schematic and layout was designed in Altium Designer and fabricated using toner transfer method.…”

Section: B Bendable and Wearable Patch Implementationmentioning

confidence: 99%

A wearable fabric-based RFID skin temperature monitoring patch

et al. 2016

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Abstract-This paper presents a novel design of wearable radio frequency identification (RFID) sensor patch make of conductive fabric and integrated on clothes. The wearable RFID with similar design is also implemented on a Polyimide (PI) substrate to show the effectiveness of the system. We also demonstrate the wearable and washable RFID patch by using conductive fabric coil antenna as well as non-conductive fabric substrate. The conductive fabric offers great flexibility and comfortability as it can be sewed into clothes and connect the components of the patch. As a proof of concept, we developed the conductive fabric based RFID for temperature sensing and demonstrate its use by measuring variations in the skin temperature. We observed that the proposed antenna is strain independent during bending. Further, it has the advantage of simplicity and is relatively free from issues such as degradation of performance.

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CMOS Vertical Hall Magnetic Sensors on Flexible Substrate

Cited by 56 publications

References 32 publications

Towards flexible magnetoelectronics for robotic applications

Towards flexible magnetoelectronics for robotic applications

Sensitivity Enhancement of a Vertical-Type CMOS Hall Device for a Magnetic Sensor

A wearable fabric-based RFID skin temperature monitoring patch

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